Inventor · disambiguated record
Young-Su Sung
Also filed as: SUNG YOUNG-SU
4 granted patents·1 pending application·13 citations·filing 2009–2014
69Inventor score
Top patents by PatentIndex Score
5 records- 0181US8568944B2Reflective extreme ultraviolet mask and method of manufacturing the sameKIM HOON·Filed 2012·Granted Oct 29, 2013·4 cites·18 claims
- 0272US8137870B2Method of manufacturing photomaskLEE MYOUNG-SOO·Filed 2009·Granted Mar 20, 2012·6 cites·19 claims
- 0361US8213722B2Method for inspecting critical dimension uniformity at high speed measurementKIM HEE-BOM·Filed 2009·Granted Jul 3, 2012·2 cites·10 claims
- 0461US8007963B2PhotomaskSAMSUNG ELECTRONICS CO LTD·Filed 2009·Granted Aug 30, 2011·1 cites·20 claims
- 0537US2014233001A1Apparatus and method for performing multi-beam based lithographySAMSUNG ELECTRONICS CO LTD·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →