Inventor · disambiguated record
Yoshihito Tada
Also filed as: TADA YOSHIHITO
1 granted patent·2 pending applications·0 citations·filing 2015–2023
1Inventor score
Files withCANON KK3
Top patents by PatentIndex Score
3 records- 0139US2024213176A1Identification information acquisition method, pattern forming method, semiconductor manufacturing facility operation method, processing apparatus, and pattern forming apparatusCANON KK·Filed 2023·Application pending·0 cites
- 0223US10359711B2Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing methodCANON KK·Filed 2015·Granted Jul 23, 2019·0 cites·6 claims
- 0313US2015248067A1Determination method, exposure apparatus, exposure system, method of manufacturing article, and storage mediumCANON KK·Filed 2015·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Yoshihito Tada files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →