Inventor · disambiguated record
Yuji Abuku
Also filed as: ABUKU YUJI
3 granted patents·45 citations·filing 1987–2008
71Inventor score
Files withCANON KK3
Top patents by PatentIndex Score
3 records- 0178US7474381B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2008·Granted Jan 6, 2009·7 cites·5 claims
- 0276US4870288AAlignment methodCANON KK·Filed 1987·Granted Sep 26, 1989·29 cites·12 claims
- 0345US7016755B2Information processing method and apparatus used in an exposure system and exposure apparatusCANON KK·Filed 2003·Granted Mar 21, 2006·9 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →