Inventor · disambiguated record
Yu-Huei Chen
Also filed as: CHEN YU-HUEI
6 granted patents·55 citations·filing 2002–2004
76Inventor score
Files withTAIWAN SEMICONDUCTOR MFG6
Top patents by PatentIndex Score
6 records- 0188US6756321B2Method for forming a capping layer over a low-k dielectric with improved adhesion and reduced dielectric constantTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jun 29, 2004·49 cites·19 claims
- 0252US6706637B2Dual damascene aperture formation method absent intermediate etch stop layerTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 16, 2004·6 cites·16 claims
- 0340US7176135B2EBR shape of spin-on low-k material providing good film stackingTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Feb 13, 2007·0 cites·25 claims
- 0440US6884149B2Method and system for in-situ monitoring of mixing ratio of high selectivity slurryTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Apr 26, 2005·0 cites·8 claims
- 0538US6812167B2Method for improving adhesion between dielectric material layersTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Nov 2, 2004·0 cites·13 claims
- 0638US6729935B2Method and system for in-situ monitoring of mixing ratio of high selectivity slurryTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted May 4, 2004·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →