Inventor · disambiguated record
Yu-Pei Chiang
Also filed as: CHIANG YU-PEI
13 granted patents·2 pending applications·9 citations·filing 2016–2025
85Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD15
Top patents by PatentIndex Score
15 records- 0188US10529578B2Method of fabricating semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jan 7, 2020·5 cites·22 claims
- 0283US2025343033A1Baffle plate for controlling wafer uniformity and methods for making the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0382US12054382B2Roughness selectivity for MEMS movement stiction reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Aug 6, 2024·0 cites·20 claims
- 0482US2025343031A1Devices and methods for controlling wafer uniformity in plasma-based processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0580US11615946B2Baffle plate for controlling wafer uniformity and methods for making the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 28, 2023·2 cites·20 claims
- 0674US12412734B2Baffle plate for controlling wafer uniformity and methods for making the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 9, 2025·0 cites·20 claims
- 0774US11655138B2Roughness selectivity for MEMS movement stiction reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 23, 2023·0 cites·20 claims
- 0873US9997336B2Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDPTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jun 12, 2018·2 cites·20 claims
- 0972US12463016B2Devices and methods for controlling wafer uniformity in plasma-based processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 4, 2025·0 cites·20 claims
- 1063US10654713B2Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widthsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 19, 2020·0 cites·20 claims
- 1161US10964547B2Method of fabricating semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 30, 2021·0 cites·20 claims
- 1260US11769652B2Devices and methods for controlling wafer uniformity in plasma-based processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 26, 2023·0 cites·18 claims
- 1358US10273152B2Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widthsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Apr 30, 2019·0 cites·20 claims
- 1449US10957516B2Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDPTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Mar 23, 2021·0 cites·20 claims
- 1547US10131539B2Method for forming micro-electro-mechanical system (MEMS) device structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Nov 20, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →