Inventor · disambiguated record
Yu Chen-Hua Douglas
Also filed as: DOUGLAS YU CHEN-HUA
3 granted patents·103 citations·filing 1996–1996
75Inventor score
Files withTAIWAN SEMICONDUCTOR MFG3
Top patents by PatentIndex Score
3 records- 0175US5840624AReduction of via over etching for borderless contactsTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Nov 24, 1998·43 cites·9 claims
- 0263US5622894AProcess to minimize a seam in tungsten filled contact holesTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Apr 22, 1997·31 cites·24 claims
- 0360US5639345ATwo step etch back process having a convex and concave etch profile for improved etch uniformity across a substrateTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Jun 17, 1997·29 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →