Inventor · disambiguated record
Yukari Hama
Also filed as: HAMA YUKARI
1 granted patent·1 pending application·4 citations·filing 2011–2011
23Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0174US8815490B2Radiation-sensitive resin composition, polymer, and method for forming resist patternMATSUDA YASUHIKO·Filed 2011·Granted Aug 26, 2014·4 cites·9 claims
- 0234US2011212401A1Radiation-sensitive resin composition, and resist pattern formation methodJSR CORP·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →