Inventor · disambiguated record
Yung-Mao Hsu
Also filed as: HSU YUNG-MAO
4 granted patents·1 pending application·79 citations·filing 1996–2002
77Inventor score
Files withTAIWAN SEMICONDUCTOR MFG5
Top patents by PatentIndex Score
5 records- 0178US5851343AProtective shield around the inner edge of endpoint window in a plasma etching chamberTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Dec 22, 1998·42 cites·15 claims
- 0274US6815653B2Method and apparatus for early detection of material accretion and peeling in plasma systemTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Nov 9, 2004·25 cites·14 claims
- 0341US5697839AVentilation hood for wet-clean process chamberTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Dec 16, 1997·10 cites·31 claims
- 0440US7354555B2Gas flow control system with interlockTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Apr 8, 2008·2 cites·20 claims
- 0530US2003198542A1Cassette pod stage equipped with locked guide pinsTAIWAN SEMICONDUCTOR MFG·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →