Inventor · disambiguated record
Yutaka Ichihara
Also filed as: ICHIHARA YUTAKA
39 granted patents·5 pending applications·2,155 citations·filing 1979–2015
98Inventor score
Top patents by PatentIndex Score
44 records- 0198US4851978AIllumination device using a laserNIKON CORP·Filed 1987·Granted Jul 25, 1989·154 cites·5 claims
- 0298US4710026APosition detection apparatusNIPPON KOGAKU KK·Filed 1986·Granted Dec 1, 1987·134 cites·17 claims
- 0397US5071240AReflecting optical imaging apparatus using spherical reflectors and producing an intermediate imageNIKON CORP·Filed 1990·Granted Dec 10, 1991·133 cites·10 claims
- 0497US4456931AElectronic cameraNIPPON KOGAKU KK·Filed 1981·Granted Jun 26, 1984·241 cites·20 claims
- 0597US4420773AElectronic photographic cameraNIPPON KOGAKU KK·Filed 1981·Granted Dec 13, 1983·233 cites·46 claims
- 0696US6195213B1Projection exposure apparatus and methodNIKON CORP·Filed 1999·Granted Feb 27, 2001·143 cites·42 claims
- 0795US5307207AIlluminating optical apparatusNIKON CORP·Filed 1991·Granted Apr 26, 1994·148 cites·23 claims
- 0895US5253110AIllumination optical arrangementNIKON CORP·Filed 1992·Granted Oct 12, 1993·172 cites·18 claims
- 0993US7843550B2Projection optical system inspecting method and inspection apparatus, and a projection optical system manufacturing methodNIKON CORP·Filed 2006·Granted Nov 30, 2010·17 cites·16 claims
- 1093US6522716B1Multilayer-film reflective mirrors, extreme UV microlithography apparatus comprising same, and microelectronic-device manufacturing methods utilizing sameNIKON CORP·Filed 2000·Granted Feb 18, 2003·49 cites·16 claims
- 1191US5898501AApparatus and methods for measuring wavefront aberrations of a microlithography projection lensNIKON CORP·Filed 1997·Granted Apr 27, 1999·94 cites·23 claims
- 1290US5289312ACatadioptric reduction projection optical systemNIKON CORP·Filed 1992·Granted Feb 22, 1994·94 cites·13 claims
- 1387US5793473AProjection optical apparatus for projecting a mask pattern onto the surface of a target projection object and projection exposure apparatus using the sameNIKON CORP·Filed 1997·Granted Aug 11, 1998·68 cites·32 claims
- 1487US5563706AInterferometric surface profiler with an alignment optical memberNIKON CORP·Filed 1994·Granted Oct 8, 1996·65 cites·8 claims
- 1586US5220454ACata-dioptric reduction projection optical systemNIKON CORP·Filed 1992·Granted Jun 15, 1993·72 cites·31 claims
- 1685US6362926B1Projection exposure apparatus and methodNIKON CORP·Filed 2000·Granted Mar 26, 2002·21 cites·19 claims
- 1782US10374217B2Apparatus and process for producing electricity storage materialJTEKT CORP·Filed 2015·Granted Aug 6, 2019·2 cites·5 claims
- 1879US4471382AData recording device for electronic cameraNIPPON KOGAKU KK·Filed 1981·Granted Sep 11, 1984·28 cites·5 claims
- 1977US8791989B2Image processing apparatus, image processing method, recording method, and recording mediumUSHIO YOSHIJIRO·Filed 2011·Granted Jul 29, 2014·4 cites·26 claims
- 2076US6894763B2Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the sameNIKON CORP·Filed 2003·Granted May 17, 2005·15 cites·103 claims
- 2172US7868997B2Projection optical system inspecting method and inspection apparatus, and a projection optical system manufacturing methodNIKON CORP·Filed 2006·Granted Jan 11, 2011·5 cites·16 claims
- 2272US5076695AInterferometerNIKON CORP·Filed 1990·Granted Dec 31, 1991·31 cites·9 claims
- 2371US5774240AExposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniquesNIKON CORP·Filed 1995·Granted Jun 30, 1998·29 cites·6 claims
- 2470US6108140ACatadioptric reduction projection optical system and methodNIKON CORP·Filed 1999·Granted Aug 22, 2000·19 cites·12 claims
- 2568US5504596AExposure method and apparatus using holographic techniquesNIKON CORP·Filed 1993·Granted Apr 2, 1996·29 cites·3 claims
- 2667US5623473AMethod and apparatus for manufacturing a diffraction grating zone plateNIKON CORP·Filed 1995·Granted Apr 22, 1997·25 cites·26 claims
- 2765US4775229AFresnel lens in a finder optical systemNIPPON KOGAKU KK·Filed 1986·Granted Oct 4, 1988·24 cites·8 claims
- 2864US5528390AExposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniquesNIKON CORP·Filed 1995·Granted Jun 18, 1996·22 cites·8 claims
- 2964US5198837ALaser beam harmonics generator and light exposing deviceNIKON CORP·Filed 1990·Granted Mar 30, 1993·21 cites·10 claims
- 3063US8675048B2Image processing apparatus, image processing method, recording method, and recording mediumUSHIO YOSHIJIRO·Filed 2011·Granted Mar 18, 2014·1 cites·24 claims
- 3160US5712735ACatadioptric reduction projection optical systemNIKON CORP·Filed 1996·Granted Jan 27, 1998·12 cites·19 claims
- 3257US4253752AFocus condition detecting deviceNIPPON KOGAKU KK·Filed 1979·Granted Mar 3, 1981·14 cites·5 claims
- 3355US5251070ACatadioptric reduction projection optical systemNIKON CORP·Filed 1992·Granted Oct 5, 1993·18 cites·12 claims
- 3449US6963408B2Method and apparatus for point diffraction interferometryNIKON CORP·Filed 2004·Granted Nov 8, 2005·5 cites·32 claims
- 3548US8933878B2Display apparatus and display methodSUGIYAMA YOSHIKAZU·Filed 2012·Granted Jan 13, 2015·0 cites·17 claims
- 3644US2004070852A1Projection eposure apparatus and methodNIKON CORP·Filed 2003·Application pending·0 cites
- 3742US2001024330A1Catadioptric reduction projection optical systemFiled 2001·Application pending·0 cites
- 3841US5844728ACatadioptric reduction projection optical systemNIKON CORP·Filed 1996·Granted Dec 1, 1998·4 cites·12 claims
- 3941US2009011368A1Exposure Method and Apparatus, and Electronic Device Manufacturing MethodICHIHARA YUTAKA·Filed 2006·Application pending·0 cites
- 4041US2012194905A1Image display apparatus and image display methodUSHIO YOSHIJIRO·Filed 2012·Application pending·0 cites
- 4140US2003215053A1Interferometer system and method of manufacturing projection optical system using sameNIKON CORP·Filed 2003·Application pending·0 cites
- 4238US6118596ACatadioptric reduction projection optical system and methodNIKON CORP·Filed 1996·Granted Sep 12, 2000·3 cites·16 claims
- 4335USRE36740ECata-dioptric reduction projection optical systemNIPPON KOGAKU KK·Filed 1995·Granted Jun 20, 2000·5 cites·33 claims
- 4426US4632531AFocusing screenNIPPON KOGAKU KK·Filed 1985·Granted Dec 30, 1986·1 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →