Inventor · disambiguated record
Yuho Kanaya
Also filed as: KANAYA YUHO
26 granted patents·6 pending applications·106 citations·filing 2004–2024
95Inventor score
Top patents by PatentIndex Score
32 records- 0194US8786829B2Exposure apparatus, exposure method, and device manufacturing methodKANAYA YUHO·Filed 2009·Granted Jul 22, 2014·25 cites·20 claims
- 0290US8023106B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing methodNIKON CORP·Filed 2008·Granted Sep 20, 2011·11 cites·27 claims
- 0389US8665455B2Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing methodKANAYA YUHO·Filed 2008·Granted Mar 4, 2014·12 cites·14 claims
- 0489US8243257B2Position measurement system, exposure apparatus, position measuring method, exposure method and device manufacturing method, and tool and measuring methodKANAYA YUHO·Filed 2008·Granted Aug 14, 2012·12 cites·29 claims
- 0586US8098362B2Detection device, movable body apparatus, pattern formation apparatus and pattern formation method, exposure apparatus and exposure method, and device manufacturing methodKANAYA YUHO·Filed 2008·Granted Jan 17, 2012·7 cites·20 claims
- 0680US8130361B2Exposure apparatus, exposure method, and method for producing deviceYASUDA MASAHIKO·Filed 2006·Granted Mar 6, 2012·4 cites·72 claims
- 0778US8085385B2Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatusKANAYA YUHO·Filed 2008·Granted Dec 27, 2011·4 cites·30 claims
- 0877US10209623B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2016·Granted Feb 19, 2019·1 cites·91 claims
- 0976US8228482B2Exposure apparatus, exposure method, and device manufacturing methodKANAYA YUHO·Filed 2009·Granted Jul 24, 2012·4 cites·22 claims
- 1074US9383656B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2015·Granted Jul 5, 2016·1 cites·44 claims
- 1173US9063438B2Exposure apparatus, exposure method, and method for producing deviceYASUDA MASAHIKO·Filed 2012·Granted Jun 23, 2015·1 cites·41 claims
- 1270US8582084B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2012·Granted Nov 12, 2013·1 cites·44 claims
- 1370US8237919B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method for continuous position measurement of movable body before and after switching between sensor headsSHIBAZAKI YUICHI·Filed 2008·Granted Aug 7, 2012·2 cites·19 claims
- 1470US7817242B2Exposure method and device manufacturing method, exposure apparatus, and programNIKON CORP·Filed 2004·Granted Oct 19, 2010·15 cites·19 claims
- 1570US2025093785A1Method of generating drawing data, drawing data generation device, drawing data generation program, exposure system, and device manufacturing methodNIKON CORP·Filed 2024·Application pending·0 cites
- 1669US8767182B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2011·Granted Jul 1, 2014·1 cites·23 claims
- 1768US8218129B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, measuring method, and position measurement systemSHIBAZAKI YUICHI·Filed 2008·Granted Jul 10, 2012·2 cites·24 claims
- 1867US8547527B2Movable body drive method and movable body drive system, pattern formation method and pattern formation apparatus, and device manufacturing methodKANAYA YUHO·Filed 2008·Granted Oct 1, 2013·2 cites·24 claims
- 1966US2019155168A1Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2019·Application pending·0 cites
- 2064US8817236B2Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing methodKANAYA YUHO·Filed 2009·Granted Aug 26, 2014·1 cites·21 claims
- 2156US8194232B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2008·Granted Jun 5, 2012·0 cites·35 claims
- 2254US9436102B2Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2014·Granted Sep 6, 2016·0 cites·35 claims
- 2353US2012293788A1Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method for continuous position measurement of moveable body before and after switching between sensor headsSHIBAZAKI YUICHI·Filed 2012·Application pending·0 cites
- 2452US8792086B2Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatusKANAYA YUHO·Filed 2011·Granted Jul 29, 2014·0 cites·10 claims
- 2552US2024152053A1Method for manufacturing semiconductor integrated circuit, method for manufacturing semiconductor device, and exposure apparatusNIKON CORP·Filed 2021·Application pending·0 cites
- 2651US2012086927A1Detection device, movable body apparatus, pattern formation apparatus and pattern formation method, exposure apparatus and exposure method, and device manufacturing methodKANAYA YUHO·Filed 2011·Application pending·0 cites
- 2748US8867022B2Movable body drive method and movable body drive system, pattern formation method and apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2008·Granted Oct 21, 2014·0 cites·22 claims
- 2847US9304412B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and measuring methodSHIBAZAKI YUICHI·Filed 2008·Granted Apr 5, 2016·0 cites·13 claims
- 2947US9256140B2Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method with measurement device to measure movable body in Z directionKANAYA YUHO·Filed 2008·Granted Feb 9, 2016·0 cites·32 claims
- 3047US9013681B2Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing methodKANAYA YUHO·Filed 2008·Granted Apr 21, 2015·0 cites·33 claims
- 3147US8422015B2Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing methodKANAYA YUHO·Filed 2008·Granted Apr 16, 2013·0 cites·11 claims
- 3239US2014022377A1Mark detection method, exposure method and exposure apparatus, and device manufacturing methodKANAYA YUHO·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →