Inventor · disambiguated record
Yu Lun Ke
Also filed as: KE YU-LUN
8 granted patents·4 pending applications·13 citations·filing 2018–2024
81Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD12
Top patents by PatentIndex Score
12 records- 0194US12080547B2Interconnect system with improved low-K dielectricsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 3, 2024·2 cites·20 claims
- 0293US10504738B2Focus ring for plasma etcherTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 10, 2019·7 cites·20 claims
- 0391US12165851B2Plasma processing method for manufacturing semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 10, 2024·2 cites·20 claims
- 0480US2023377963A1Etch profile control of interconnect structuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0578US2024363336A1Interconnect system with improved low-k dielectricsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0676US11854873B2Etch profile control of interconnect structuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 26, 2023·0 cites·20 claims
- 0775US11075087B2Focus ring for plasma etcherTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jul 27, 2021·1 cites·20 claims
- 0873US10529543B2Etch process with rotatable shower headTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jan 7, 2020·1 cites·20 claims
- 0973US2025069860A1Plasma processing method for manufacturing semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1063US11043373B2Interconnect system with improved low-k dielectricsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 22, 2021·0 cites·20 claims
- 1161US11227747B2Etch process with rotatable shower headTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 18, 2022·0 cites·20 claims
- 1259US2020043740A1Focus ring for plasma etcherTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →