Inventor · disambiguated record
Yung-Yao Lee
Also filed as: LEE YUNG-YAO
61 granted patents·16 pending applications·91 citations·filing 2004–2025
98Inventor score
Top patents by PatentIndex Score
77 records- 0198US9841687B2Synchronized integrated metrology for overlay-shift reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Dec 12, 2017·28 cites·20 claims
- 0297US11487210B1Method and system of surface topography measurement for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 1, 2022·4 cites·20 claims
- 0396US11835866B2Method and system of surface topography measurement for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 5, 2023·2 cites·20 claims
- 0494US11543754B1Extractor piping on outermost sidewall of immersion hood apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jan 3, 2023·2 cites·20 claims
- 0594US8703368B2Lithography processLEE YUNG-YAO·Filed 2012·Granted Apr 22, 2014·14 cites·20 claims
- 0688US12306542B2Immersion exposure toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted May 20, 2025·0 cites·20 claims
- 0787US12189306B2Method and system of surface topography measurement for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jan 7, 2025·0 cites·20 claims
- 0887US2025093787A1Method and system of surface topography measurement for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0985US12242199B2Method of using wafer stageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Mar 4, 2025·0 cites·20 claims
- 1084US12048944B2Method of operating drippage prevention systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 30, 2024·1 cites·20 claims
- 1184US10942329B1Optical module structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 9, 2021·2 cites·20 claims
- 1283US10157741B1Method of manufacturing a semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 18, 2018·4 cites·20 claims
- 1382US11244827B2Semiconductor manufacturing method and apparatus thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Feb 8, 2022·2 cites·20 claims
- 1482US10747128B2Exposure method and exposure apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 18, 2020·3 cites·20 claims
- 1581US12282318B2Semiconductor wafer coolingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Apr 22, 2025·0 cites·20 claims
- 1681US11500299B2Exposure method and exposure apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Nov 15, 2022·1 cites·20 claims
- 1780US12235582B2Semiconductor developer tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 1880US2025199415A1Method of using wafer stageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1979US12092958B2Wafer stage and method of usingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 17, 2024·0 cites·20 claims
- 2079US9188876B2Method of determining overlay error and control system for dynamic control of reticle positionLEE YUNG-YAO·Filed 2012·Granted Nov 17, 2015·3 cites·20 claims
- 2179US8860941B2Tool induced shift reduction determination for overlay metrologyLEE YUNG-YAO·Filed 2012·Granted Oct 14, 2014·3 cites·19 claims
- 2279US2025258435A1Semiconductor structure and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 2378US12130553B2Resist pump buffer tank and method of resist defect reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 29, 2024·0 cites·20 claims
- 2478US10875148B2Apparatus and methods for chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 29, 2020·2 cites·18 claims
- 2578US2024342745A1Method of operating drippage prevention systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2677US9646896B2Lithographic overlay samplingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted May 9, 2017·4 cites·20 claims
- 2777US2025216841A1Semiconductor wafer coolingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 2876US9176396B2Overlay sampling methodologyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Nov 3, 2015·3 cites·20 claims
- 2975US11221564B2Method for improving exposure performance and apparatus thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 11, 2022·1 cites·20 claims
- 3074US12362160B2Method for forming layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 15, 2025·0 cites·5 claims
- 3174US12292686B2Semiconductor structure and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 6, 2025·0 cites·20 claims
- 3274US11860547B2Extractor piping on outermost sidewall of immersion hood apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jan 2, 2024·0 cites·20 claims
- 3374US11378889B2Immersion lithography system and method of usingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 5, 2022·0 cites·20 claims
- 3474US10061211B2Method for layoutless overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Aug 28, 2018·1 cites·20 claims
- 3574US8852673B2Defect monitoring for resist layerLAING CHE-RONG·Filed 2011·Granted Oct 7, 2014·4 cites·20 claims
- 3673US10792697B2Drippage prevention system and method of operating sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Oct 6, 2020·1 cites·20 claims
- 3773US10691020B2Apparatus for dispensing liquid material and method for fabricating semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 23, 2020·1 cites·19 claims
- 3872US11768484B2Semiconductor wafer coolingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 26, 2023·0 cites·20 claims
- 3972US11756789B2Semiconductor manufacturing method and apparatus thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 12, 2023·0 cites·20 claims
- 4071US12191127B2Apparatus for physical vapor deposition and method for forming a layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 7, 2025·0 cites·11 claims
- 4171US12191146B2Method of manufacturing semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jan 7, 2025·0 cites·20 claims
- 4271US10831110B2Lithographic overlay correction and lithographic processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Nov 10, 2020·1 cites·19 claims
- 4371US2025155815A1Semiconductor developer tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 4470US11966165B2Immersion exposure toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Apr 23, 2024·0 cites·20 claims
- 4570US11747729B2Semiconductor developer tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 5, 2023·0 cites·20 claims
- 4670US2024387147A1Cantilever with etch chamber flow designTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4768US9766559B2Edge-dominant alignment method in exposure scanner systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Sep 19, 2017·1 cites·17 claims
- 4868US2022334486A1Resist pump buffer tank and method of resist defect reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 4967US11022018B2Exhaust system and method of usingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 1, 2021·0 cites·20 claims
- 5065US9772561B2Semiconductor manufacturing method and toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 26, 2017·1 cites·20 claims
Showing the top 50 of 77 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →