Inventor · disambiguated record
Yuan-Yen Lo
Also filed as: LO YUAN-YEN
7 granted patents·1 pending application·4 citations·filing 2016–2023
73Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD8
Top patents by PatentIndex Score
8 records- 0181US10451979B2Apparatus for EUV lithography and method of measuring focusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 22, 2019·2 cites·20 claims
- 0275US9711420B1Inline focus monitoringTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jul 18, 2017·2 cites·20 claims
- 0372US2023260838A1Method for fabricating a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0470US11621191B2Method for fabricating a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 4, 2023·0 cites·20 claims
- 0562US10879119B2Method for fabricating a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 29, 2020·0 cites·20 claims
- 0661US11022898B2Apparatus for EUV lithography and method of measuring focusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 1, 2021·0 cites·20 claims
- 0748US12204248B2Surface charge release in lithography developing processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jan 21, 2025·0 cites·20 claims
- 0842US9905471B2Integrated circuit structure and method forming trenches with different depthsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Feb 27, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →