Inventor · disambiguated record

Yuko Odamura

Also filed as: ODAMURA YUKO

1 granted patent·10 citations·filing 2000–2000

33Inventor score

Technology areasH10P

Files withMITSUBISHI ELECTRIC CORP1

Top patents by PatentIndex Score

1 record

0160US6555790B1Semiconductor manufacturing apparatus, method for cleaning the semiconductor manufacturing apparatus, and light source unitMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Apr 29, 2003·10 cites·11 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →