Inventor · disambiguated record
Yutaka Omoto
Also filed as: OMOTO YUTAKA
7 granted patents·5 pending applications·189 citations·filing 1985–2020
85Inventor score
Top patents by PatentIndex Score
12 records- 0195US4631106APlasma processorHITACHI LTD·Filed 1985·Granted Dec 23, 1986·99 cites·12 claims
- 0289US6624084B2Plasma processing equipment and plasma processing method using the sameHITACHI LTD·Filed 2000·Granted Sep 23, 2003·47 cites·24 claims
- 0378US8920665B2Plasma processing apparatus and plasma processing methodSATO KOHEI·Filed 2012·Granted Dec 30, 2014·4 cites·5 claims
- 0478US4943361APlasma treating method and apparatus thereforHITACHI LTD·Filed 1988·Granted Jul 24, 1990·23 cites·16 claims
- 0554US9343336B2Plasma processing apparatus and plasma processing methodHITACHI HIGH TECH CORP·Filed 2014·Granted May 17, 2016·0 cites·5 claims
- 0649US11955360B2Electrostatic chuck and processing apparatusTOCALO CO LTD·Filed 2020·Granted Apr 9, 2024·0 cites·8 claims
- 0749US6156663AMethod and apparatus for plasma processingHITACHI LTD·Filed 1996·Granted Dec 5, 2000·16 cites·11 claims
- 0849US2008170969A1Plasma processing apparatusYOSHIOKA KEN·Filed 2007·Application pending·0 cites
- 0946US2012000774A1Plasma Processing ApparatusYOSHIOKA KEN·Filed 2011·Application pending·0 cites
- 1045US2009321017A1Plasma Processing Apparatus and Plasma Processing MethodTSUBONE TSUNEHIKO·Filed 2008·Application pending·0 cites
- 1145US2007181254A1Plasma processing apparatus with resonance countermeasure functionHITACHI HIGH TECH CORP·Filed 2006·Application pending·0 cites
- 1242US2007209933A1Sample holding electrode and a plasma processing apparatus using the sameYOSHIOKA KEN·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →