Inventor · disambiguated record
Yuichi Shibazaki
Also filed as: SHIBAZAKI YUICHI
230 granted patents·65 pending applications·1,668 citations·filing 2001–2025
99Inventor score
Top patents by PatentIndex Score
295 records- 0199US8203697B2Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2011·Granted Jun 19, 2012·29 cites·10 claims
- 0299US7489389B2Stage device with frame-shaped member movable in at least three degrees of freedom within a two-dimensional planeNIKON CORP·Filed 2005·Granted Feb 10, 2009·566 cites·17 claims
- 0398US10338482B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing methodNIKON CORP·Filed 2018·Granted Jul 2, 2019·10 cites·35 claims
- 0498US9971246B2Exposure method, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2016·Granted May 15, 2018·18 cites·31 claims
- 0598US9891531B2Exposure apparatus and exposure method, and device manufacturing methodNIPPON KOGAKU KK·Filed 2017·Granted Feb 13, 2018·15 cites·25 claims
- 0698US8134688B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration methodSHIBAZAKI YUICHI·Filed 2007·Granted Mar 13, 2012·45 cites·29 claims
- 0798US8045136B2Stage drive method and stage unit, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2007·Granted Oct 25, 2011·50 cites·16 claims
- 0898US8013982B2Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing methodNIKON CORP·Filed 2007·Granted Sep 6, 2011·34 cites·22 claims
- 0997US11977339B2Substrate processing system and substrate processing method, and device manufacturing methodNIKON CORP·Filed 2022·Granted May 7, 2024·2 cites·14 claims
- 1097US9983486B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted May 29, 2018·14 cites·38 claims
- 1197US8675171B2Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making methodSHIBAZAKI YUICHI·Filed 2007·Granted Mar 18, 2014·32 cites·27 claims
- 1297US8054472B2Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing methodNIKON CORP·Filed 2007·Granted Nov 8, 2011·30 cites·42 claims
- 1397US7839485B2Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2007·Granted Nov 23, 2010·43 cites·216 claims
- 1497US7589822B2Stage drive method and stage unit, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2004·Granted Sep 15, 2009·72 cites·29 claims
- 1596US10409166B2Exposure apparatus and exposure method, and device manufacturing methodNIKON CORP·Filed 2017·Granted Sep 10, 2019·5 cites·27 claims
- 1696US9971253B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration methodNIKON CORP·Filed 2017·Granted May 15, 2018·9 cites·40 claims
- 1796US9958792B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted May 1, 2018·9 cites·29 claims
- 1896US9323160B2Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording mediumNIKON CORP·Filed 2013·Granted Apr 26, 2016·10 cites·52 claims
- 1996US9207549B2Exposure apparatus and exposure method, and device manufacturing method with encoder of higher reliability for position measurementNIKON CORP·Filed 2012·Granted Dec 8, 2015·15 cites·20 claims
- 2095US10852639B2Exposure apparatus and exposure method, and device manufacturing methodNIKON CORP·Filed 2019·Granted Dec 1, 2020·3 cites·28 claims
- 2195US10775708B2Substrate processing system and substrate processing method, and device manufacturing methodNIKON CORP·Filed 2017·Granted Sep 15, 2020·9 cites·55 claims
- 2295US10073345B2Exposure method, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2016·Granted Sep 11, 2018·7 cites·33 claims
- 2395US9874822B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing methodNIPPON KOGAKU KK·Filed 2014·Granted Jan 23, 2018·9 cites·47 claims
- 2495US9857701B2Exposure apparatus, exposure method, and device manufacturing methodNIPPON KOGAKU KK·Filed 2016·Granted Jan 2, 2018·13 cites·25 claims
- 2595US9423703B2Exposure apparatus and device manufacturing method measuring position of substrate stage using at least three of four encoder headsSHIBAZAKI YUICHI·Filed 2011·Granted Aug 23, 2016·7 cites·33 claims
- 2695US9377698B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration methodNIKON CORP·Filed 2015·Granted Jun 28, 2016·8 cites·23 claims
- 2795US8514395B2Exposure method, exposure apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2010·Granted Aug 20, 2013·12 cites·31 claims
- 2895US7619715B2Coupling apparatus, exposure apparatus, and device fabricating methodNIKON CORP·Filed 2005·Granted Nov 17, 2009·19 cites·54 claims
- 2994US10151979B2Exposure method, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2017·Granted Dec 11, 2018·5 cites·23 claims
- 3094US9678433B2Exposure apparatus and exposure method, and device manufacturing methodNIKON CORP·Filed 2013·Granted Jun 13, 2017·6 cites·26 claims
- 3194US9429854B2Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration methodNIKON CORP·Filed 2014·Granted Aug 30, 2016·8 cites·41 claims
- 3294US9423705B2Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing methodNIKON CORP·Filed 2014·Granted Aug 23, 2016·6 cites·21 claims
- 3394US7999918B2Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing methodNIKON CORP·Filed 2007·Granted Aug 16, 2011·17 cites·62 claims
- 3493US10684562B2Measurement device, lithography system and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2017·Granted Jun 16, 2020·7 cites·89 claims
- 3593US10139738B2Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing methodNIKON CORP·Filed 2017·Granted Nov 27, 2018·3 cites·28 claims
- 3693US9507267B2Exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2016·Granted Nov 29, 2016·3 cites·43 claims
- 3793US9477155B2Exposure method, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2014·Granted Oct 25, 2016·7 cites·43 claims
- 3893US9389517B2Exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2015·Granted Jul 12, 2016·3 cites·45 claims
- 3993US9372414B2Exposure method and device manufacturing method measuring position of substrate stage using at least three of four encoder headsNIKON CORP·Filed 2012·Granted Jun 21, 2016·6 cites·37 claims
- 4093US8937710B2Exposure method and apparatus compensating measuring error of encoder due to grating section and displacement of movable body in Z directionSHIBAZAKI YUICHI·Filed 2012·Granted Jan 20, 2015·5 cites·39 claims
- 4193US8842278B2Exposure method, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Sep 23, 2014·8 cites·33 claims
- 4293US8553203B2Stage drive method and stage unit, exposure apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2009·Granted Oct 8, 2013·7 cites·31 claims
- 4393US8027021B2Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing methodNIKON CORP·Filed 2007·Granted Sep 27, 2011·11 cites·54 claims
- 4493US7394526B2Stage apparatus, fixation method, exposure apparatus, exposure method, and device-producing methodNIKON CORP·Filed 2005·Granted Jul 1, 2008·14 cites·15 claims
- 4592US11274919B2Measurement system, substrate processing system, and device manufacturing methodNIKON CORP·Filed 2019·Granted Mar 15, 2022·4 cites·37 claims
- 4692US11256175B2Exposure apparatus and exposure method, and device manufacturing methodNIKON CORP·Filed 2020·Granted Feb 22, 2022·2 cites·17 claims
- 4792US10698326B2Measurement device, lithography system and exposure apparatus, and control method, overlay measurement method and device manufacturing methodNIKON CORP·Filed 2017·Granted Jun 30, 2020·3 cites·50 claims
- 4892US10268126B2Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2017·Granted Apr 23, 2019·6 cites·19 claims
- 4992US9588443B2Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2014·Granted Mar 7, 2017·10 cites·19 claims
- 5092US9291917B2Exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2015·Granted Mar 22, 2016·3 cites·43 claims
Showing the top 50 of 295 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →