Inventor · disambiguated record
Yu-Shan Shih
Also filed as: SHIH Yu-Shan
2 granted patents·4 citations·filing 2015–2016
46Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD2
Top patents by PatentIndex Score
2 records- 0172US10879049B2Chemical vapor deposition tool and operating method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Dec 29, 2020·2 cites·20 claims
- 0268US10998219B2Wafer support device and method for removing lift pin therefromTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted May 4, 2021·2 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →