Inventor · disambiguated record
Yunwon Song
Also filed as: SONG YUNWON
2 granted patents·1 citations·filing 2015–2015
31Inventor score
Top patents by PatentIndex Score
2 records- 0149US9437441B2Methods for etching substrate and semiconductor devicesINDUSTRY-ACADEMIC COOPERATION FOUNDATION YONSEI UNIV·Filed 2015·Granted Sep 6, 2016·1 cites·9 claims
- 0229US9911615B2Apparatus and method for etching substrate, stamp for etching substrate and method for manufacturing the sameUNIV YONSEI IACF·Filed 2015·Granted Mar 6, 2018·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →