Inventor · disambiguated record
Yueh-Mao Sun
Also filed as: SUN YUEH-MAO
1 granted patent·1 pending application·1 citations·filing 2002–2005
17Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0134US6951767B1Development hastened stability of titanium nitride for APM etching rate monitorTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Oct 4, 2005·1 cites·22 claims
- 0230US2005233481A1Novel development hastened stability of titanium nitride for APM etching rate monitorLIN YEN-FEI·Filed 2005·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Yueh-Mao Sun files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →