Inventor · disambiguated record
Yu-Hsi Tang
Also filed as: TANG YU-HSI
4 granted patents·4 pending applications·2 citations·filing 2021–2025
60Inventor score
Technology areasH10P
Files withTAIWAN SEMICONDUCTOR MFG CO LTD8
Top patents by PatentIndex Score
8 records- 0191US12165851B2Plasma processing method for manufacturing semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 10, 2024·2 cites·20 claims
- 0280US2025364231A1Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0373US2025069860A1Plasma processing method for manufacturing semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0470US2024387152A1Dry etcher uniformity control by tuning edge zone plasma sheathTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0570US2024379387A1Small gas flow monitoring of dry etcher by oes signalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0669US12488968B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 2, 2025·0 cites·20 claims
- 0763US12334314B2Dry etcher uniformity control by tuning edge zone plasma sheathTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 17, 2025·0 cites·20 claims
- 0860US12142494B2Small gas flow monitoring of dry etcher by OES signalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 12, 2024·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →