Inventor · disambiguated record
Yung-Li Tsai
Also filed as: TSAI YUNG-LI
11 granted patents·3 pending applications·3 citations·filing 2012–2025
82Inventor score
Technology areasH10P
Top patents by PatentIndex Score
14 records- 0182US12257610B2Apparatus and method for wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Mar 25, 2025·0 cites·20 claims
- 0276US11958090B2Apparatus and method for wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Apr 16, 2024·0 cites·20 claims
- 0375US2024363377A1Systems and methods for shuttered wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0474US9583352B2Method of etching and cleaning wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Feb 28, 2017·2 cites·20 claims
- 0573US12068179B2Systems and methods for shuttered wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 20, 2024·0 cites·20 claims
- 0673US2025161998A1Apparatus And Method For Wafer CleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0772US12020964B2Contamination control in semiconductor manufacturing systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jun 25, 2024·0 cites·20 claims
- 0868US10943804B2Monitoring of process chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 9, 2021·1 cites·20 claims
- 0962US11766703B2Apparatus and method for wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 26, 2023·0 cites·20 claims
- 1060US11355366B2Systems and methods for shuttered wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 7, 2022·0 cites·19 claims
- 1160US11282728B2Contamination control in semiconductor manufacturing systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 22, 2022·0 cites·20 claims
- 1247US9136149B2Loading port, system for etching and cleaning wafers and method of useTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Sep 15, 2015·0 cites·20 claims
- 1341US2020058521A1Wafer cleaning with dynamic contactsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Application pending·0 cites
- 1437US11139183B2Systems and methods for dry wafer transportTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 5, 2021·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →