Inventor · disambiguated record
Yutaka Uda
Also filed as: UDA YUTAKA
4 granted patents·2 pending applications·149 citations·filing 1997–2004
80Inventor score
Files withNIKON CORP5
Top patents by PatentIndex Score
6 records- 0192US6590355B1Linear motor device, stage device, and exposure apparatusNIKON CORP·Filed 2000·Granted Jul 8, 2003·97 cites·20 claims
- 0281US6857950B2Polishing apparatus, semiconductor device manufacturing method using the polishing apparatus, and semiconductor device manufactured by the manufacturing methodNIKON CORP·Filed 2001·Granted Feb 22, 2005·29 cites·39 claims
- 0359US6002320AElectrical coil assembly having a plurality of coils arranged in pairsNIKON CORP·Filed 1997·Granted Dec 14, 1999·16 cites·13 claims
- 0438US6121867AElectrical coil assembly having a plurality of coils arranged in pairsNIKON CORP·Filed 1999·Granted Sep 19, 2000·7 cites·20 claims
- 0536US2005221736A1Wafer polishing control system for chemical mechanical planarization machinesNIKON CORP·Filed 2004·Application pending·0 cites
- 0634US2004242132A1Polishing element, cmp polishing device and productionj method for semiconductor deviceFiled 2002·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Yutaka Uda files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →