Inventor · disambiguated record
Yutaka Unno
Also filed as: UNNO YUTAKA
28 granted patents·11 pending applications·152 citations·filing 2002–2025
95Inventor score
Top patents by PatentIndex Score
39 records- 0189US7279661B2Heating apparatusNGK INSULATORS LTD·Filed 2002·Granted Oct 9, 2007·53 cites·1 claims
- 0288US7632356B2Gas providing member and processing deviceNGK INSULATORS LTD·Filed 2006·Granted Dec 15, 2009·18 cites·12 claims
- 0385US8193473B2Uniform temperature heaterUNNO YUTAKA·Filed 2009·Granted Jun 5, 2012·16 cites·5 claims
- 0482US6875960B2Heating systemNGK INSULATORS LTD·Filed 2002·Granted Apr 5, 2005·28 cites·8 claims
- 0581US11956863B2Multi-zone heaterNGK INSULATORS LTD·Filed 2020·Granted Apr 9, 2024·1 cites·8 claims
- 0679US7560668B2Substrate processing deviceNGK INSULATORS LTD·Filed 2006·Granted Jul 14, 2009·8 cites·6 claims
- 0778US11574822B2Wafer support table with ceramic substrate including core and surface layerNGK INSULATORS LTD·Filed 2019·Granted Feb 7, 2023·2 cites·6 claims
- 0877US11223302B2Electrostatic chuck having an annular outer region covered by an insulating filmNGK INSULATORS LTD·Filed 2019·Granted Jan 11, 2022·2 cites·6 claims
- 0974US9123757B2Heating device and semiconductor manufacturing apparatusNGK INSULATORS LTD·Filed 2013·Granted Sep 1, 2015·5 cites·7 claims
- 1072US8394199B2Processing deviceTOMITA YASUMITSU·Filed 2006·Granted Mar 12, 2013·7 cites·2 claims
- 1171US7345260B2Heater and method of manufacturing the sameNGK INSULATORS LTD·Filed 2006·Granted Mar 18, 2008·3 cites·8 claims
- 1269US10566218B2Ceramic heaterNGK INSULATORS LTD·Filed 2018·Granted Feb 18, 2020·1 cites·6 claims
- 1369US7401399B2Method of manufacturing a substrate heating deviceNGK INSULATORS LTD·Filed 2005·Granted Jul 22, 2008·3 cites·21 claims
- 1466US7173220B2Heating deviceNGK INSULATORS LTD·Filed 2005·Granted Feb 6, 2007·2 cites·2 claims
- 1562US2025191954A1Ceramic susceptorNGK INSULATORS LTD·Filed 2024·Application pending·0 cites
- 1661US2025063636A1Multizone ceramic heaterNGK INSULATORS LTD·Filed 2024·Application pending·0 cites
- 1761US2025038041A1Ceramic susceptorNGK INSULATORS LTD·Filed 2024·Application pending·0 cites
- 1859US11664203B2Electrostatic-chuck heaterNGK INSULATORS LTD·Filed 2020·Granted May 30, 2023·0 cites·9 claims
- 1958US2023317431A1Joined structureNGK INSULATORS LTD·Filed 2023·Application pending·0 cites
- 2058US2025176074A1Ceramic heaterNGK INSULATORS LTD·Filed 2024·Application pending·0 cites
- 2158US2025159764A1Ceramic heaterNGK INSULATORS LTD·Filed 2024·Application pending·0 cites
- 2257US12170190B2Wafer support table and RF rodNGK INSULATORS LTD·Filed 2022·Granted Dec 17, 2024·0 cites·9 claims
- 2356US2025313512A1Ceramic susceptorNGK INSULATORS LTD·Filed 2025·Application pending·0 cites
- 2455US11688590B2Electrostatic-chuck heaterNGK INSULATORS LTD·Filed 2019·Granted Jun 27, 2023·0 cites·7 claims
- 2555US7686889B2Susceptor for semiconductor manufacturing apparatusNGK INSULATORS LTD·Filed 2008·Granted Mar 30, 2010·0 cites·4 claims
- 2653US11602012B2Wafer placement table and method for manufacturing the sameNGK INSULATORS LTD·Filed 2020·Granted Mar 7, 2023·0 cites·8 claims
- 2753US11367631B2Ceramic heater and manufacturing method for tubular shaftNGK INSULATORS LTD·Filed 2019·Granted Jun 21, 2022·0 cites·7 claims
- 2853US2025323084A1Heater for semiconductor manufacturing apparatusNGK INSULATORS LTD·Filed 2025·Application pending·0 cites
- 2951US12398465B2Ceramic heaterNGK INSULATORS LTD·Filed 2021·Granted Aug 26, 2025·0 cites·9 claims
- 3051US6958462B2Ceramic heatersNGK INSULATORS LTD·Filed 2003·Granted Oct 25, 2005·3 cites·21 claims
- 3147US12452963B2Ceramic heaterNGK INSULATORS LTD·Filed 2021·Granted Oct 21, 2025·0 cites·5 claims
- 3247US11483901B2Ceramic heaterNGK INSULATORS LTD·Filed 2020·Granted Oct 25, 2022·0 cites·7 claims
- 3345US9548226B2Member for semiconductor manufacturing apparatus and method for manufacturing the sameNGK INSULATORS LTD·Filed 2013·Granted Jan 17, 2017·0 cites·12 claims
- 3445US7432474B2Heating deviceNGK INSULATORS LTD·Filed 2007·Granted Oct 7, 2008·0 cites·7 claims
- 3541US2004104211A1Heater and method of manufacturing sameNGK INSULATORS LTD·Filed 2003·Application pending·0 cites
- 3640US7948516B2Position accuracy evaluation method and position accuracy evaluation apparatusNGK INSULATORS LTD·Filed 2006·Granted May 24, 2011·0 cites·4 claims
- 3740US2006267494A1Plasma processing deviceNGK INSULATORS LTD·Filed 2006·Application pending·0 cites
- 3836US2017069520A1Joined structureNGK INSULATORS LTD·Filed 2016·Application pending·0 cites
- 3931US10861680B2Wafer supportNGK INSULATORS LTD·Filed 2018·Granted Dec 8, 2020·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →