Inventor · disambiguated record
Yu-Hen Wu
Also filed as: WU YU-HEN
6 granted patents·9 citations·filing 2016–2019
75Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD6
Top patents by PatentIndex Score
6 records- 0187US10295909B2Edge-exposure tool with an ultraviolet (UV) light emitting diode (LED)TAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 21, 2019·5 cites·20 claims
- 0280US10283457B2Method for lithographically forming wafer identification marks and alignment marksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 7, 2019·2 cites·20 claims
- 0377US10283456B2Lithography engraving machine for forming water identification marks and aligment marksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted May 7, 2019·2 cites·20 claims
- 0464US11562968B2Apparatus for lithographically forming wafer identification marks and alignment marksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 24, 2023·0 cites·20 claims
- 0562US10739682B2Edge-exposure tool with an ultraviolet (UV) light emitting diode (LED)TAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 11, 2020·0 cites·20 claims
- 0659US10509323B2Edge-exposure tool with an ultraviolet (UV) light emitting diode (LED)TAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 17, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →