Inventor · disambiguated record
Yuko Yamaguchi
Also filed as: YAMAGUCHI YUKO
8 granted patents·2 pending applications·260 citations·filing 1998–2007
88Inventor score
Top patents by PatentIndex Score
10 records- 0191US6358665B1Radiation-sensitive composition of chemical amplification typeCLARIANT INT LTD·Filed 1999·Granted Mar 19, 2002·125 cites·42 claims
- 0282US6479210B2Chemically amplified resist compositionCLARIANT FINANCE BVI LTD·Filed 1999·Granted Nov 12, 2002·77 cites·5 claims
- 0369US7094994B2Heat treatment apparatus and method of semiconductor waferSONY CORP·Filed 2004·Granted Aug 22, 2006·13 cites·9 claims
- 0467US6284427B1Process for preparing resistsCLARIANT FINANCE BVI LTD·Filed 1998·Granted Sep 4, 2001·18 cites·27 claims
- 0566US6686121B2Process for preparing resistsCLARIANT FINANCE BVI LTD·Filed 2001·Granted Feb 3, 2004·6 cites·7 claims
- 0662US7655377B2Antireflection film and exposure methodSONY CORP·Filed 2006·Granted Feb 2, 2010·2 cites·15 claims
- 0761US6848198B2Heat treatment apparatus and method of heat treatmentSONY CORP·Filed 2003·Granted Feb 1, 2005·8 cites·18 claims
- 0844US6527966B1Pattern forming methodCLARIANT FINANCE BVI LTD·Filed 1999·Granted Mar 4, 2003·11 cites·5 claims
- 0942US2007298615A1Pattern forming method and method of manufacturing semiconductor devicesMATSUZAWA NOBUYUKI·Filed 2007·Application pending·0 cites
- 1034US2004241596A1Method of forming resist patterns and method of producing semiconductor deviceFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →