Inventor · disambiguated record
Yu-Lung Yang
Also filed as: YANG YU-LUNG
4 granted patents·3 pending applications·1 citations·filing 2012–2024
56Inventor score
Top patents by PatentIndex Score
7 records- 0161US2022351948A1Method for treating semiconductor waferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 0257US11948810B2Apparatus for processing substrates or wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Apr 2, 2024·1 cites·20 claims
- 0354US10748768B2Method for mandrel and spacer patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 18, 2020·0 cites·20 claims
- 0452US2021249232A1Apparatus and method for etchingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Application pending·0 cites
- 0550US10157742B2Method for mandrel and spacer patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Dec 18, 2018·0 cites·20 claims
- 0649US2024249957A1Apparatus for processing substrates or wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0737US8920888B2Plasma process, film deposition method and system using rotary chuckYANG YU-LUNG·Filed 2012·Granted Dec 30, 2014·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →