Inventor · disambiguated record
Yuji Yoneoka
Also filed as: YONEOKA YUJI
4 granted patents·335 citations·filing 1989–1995
83Inventor score
Files withHITACHI LTD4
Top patents by PatentIndex Score
4 records- 0195US4963239ASputtering process and an apparatus for carrying out the sameHITACHI LTD·Filed 1989·Granted Oct 16, 1990·168 cites·22 claims
- 0279US6171641B1Vacuum processing apparatus, and a film deposition apparatus and a film deposition method both using the vacuum processing apparatusHITACHI LTD·Filed 1994·Granted Jan 9, 2001·71 cites·5 claims
- 0378US5815396AVacuum processing device and film forming device and method using sameHITACHI LTD·Filed 1995·Granted Sep 29, 1998·51 cites·48 claims
- 0474US5707500AVacuum processing equipment, film coating equipment and deposition methodHITACHI LTD·Filed 1995·Granted Jan 13, 1998·45 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →