Inventor · disambiguated record
Yukifumi Yoshida
Also filed as: YOSHIDA YUKIFUMI
22 granted patents·19 pending applications·28 citations·filing 2013–2025
92Inventor score
Top patents by PatentIndex Score
41 records- 0191US11543752B2Substrate processing method, substrate processing apparatus, and recipe selection methodSCREEN HOLDINGS CO LTD·Filed 2020·Granted Jan 3, 2023·2 cites·24 claims
- 0289US10792712B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2019·Granted Oct 6, 2020·6 cites·17 claims
- 0387US11211241B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2019·Granted Dec 28, 2021·4 cites·14 claims
- 0483US11101147B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted Aug 24, 2021·3 cites·7 claims
- 0583US11020776B2Substrate cleaning method and substrate cleaning apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted Jun 1, 2021·3 cites·7 claims
- 0683US10720333B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Jul 21, 2020·2 cites·12 claims
- 0781US11260431B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2020·Granted Mar 1, 2022·1 cites·18 claims
- 0880US11404292B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted Aug 2, 2022·2 cites·22 claims
- 0979US10058900B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2014·Granted Aug 28, 2018·3 cites·5 claims
- 1076US11413662B2Substrate cleaning apparatus and substrate cleaning methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Aug 16, 2022·2 cites·22 claims
- 1173US2022189782A1Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2022·Application pending·0 cites
- 1270US11342190B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2020·Granted May 24, 2022·0 cites·12 claims
- 1369US11710629B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2021·Granted Jul 25, 2023·0 cites·12 claims
- 1468US11921426B2Substrate processing method, substrate processing apparatus, and recipe selection methodSCREEN HOLDINGS CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·3 claims
- 1568US11872605B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2022·Granted Jan 16, 2024·0 cites·7 claims
- 1667US2022331845A1Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2022·Application pending·0 cites
- 1766US2022392780A1Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2022·Application pending·0 cites
- 1864US11901173B2Substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2021·Granted Feb 13, 2024·0 cites·15 claims
- 1962US11517941B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2021·Granted Dec 6, 2022·0 cites·7 claims
- 2061US2021331192A1Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2021·Application pending·0 cites
- 2161US2021237128A1Substrate cleaning method and substrate cleaning apparatusSCREEN HOLDINGS CO LTD·Filed 2021·Application pending·0 cites
- 2259US12403500B2Substrate processing with polymer-containing liquidSCREEN HOLDINGS CO LTD·Filed 2022·Granted Sep 2, 2025·0 cites·12 claims
- 2359US10199231B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2014·Granted Feb 5, 2019·0 cites·15 claims
- 2458US11094529B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Aug 17, 2021·0 cites·6 claims
- 2557US11919051B2Substrate cleaning apparatus and substrate cleaning methodSCREEN HOLDINGS CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·36 claims
- 2656US2024002757A1Self-assembled monolayer removing liquid, and substrate treating method and substrate treating apparatus using the sameSCREEN HOLDINGS CO LTD·Filed 2023·Application pending·0 cites
- 2756US2020194281A1Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2019·Application pending·0 cites
- 2854US2025201598A1Substrate treating method and substrate treating apparatusSCREEN HOLDINGS CO LTD·Filed 2022·Application pending·0 cites
- 2950US2025299977A1Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2025·Application pending·0 cites
- 3050US2025296011A1Organic solvent collection apparatus, substrate processing apparatus, and organic solvent collection methodSCREEN HOLDINGS CO LTD·Filed 2025·Application pending·0 cites
- 3150US2025299978A1Organic solvent collection apparatus, substrate processing apparatus, and organic solvent collection methodSCREEN HOLDINGS CO LTD·Filed 2025·Application pending·0 cites
- 3250US2025299976A1Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2025·Application pending·0 cites
- 3350US2025296127A1Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2025·Application pending·0 cites
- 3449US2025296126A1Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2025·Application pending·0 cites
- 3549US2024178012A1Substrate treatment method and substrate treatment deviceSCREEN HOLDINGS CO LTD·Filed 2021·Application pending·0 cites
- 3648US11501984B2Substrate processing device and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Nov 15, 2022·0 cites·13 claims
- 3748US2025296049A1Organic solvent collection apparatus, substrate processing apparatus, and organic solvent collection methodSCREEN HOLDINGS CO LTD·Filed 2025·Application pending·0 cites
- 3845US12269068B2Substrate processing method and substrate processing deviceSCREEN HOLDINGS CO LTD·Filed 2020·Granted Apr 8, 2025·0 cites·10 claims
- 3941US2024047245A1Substrate treatment method and substrate treatment deviceSCREEN HOLDINGS CO LTD·Filed 2022·Application pending·0 cites
- 4041US2014060573A1Substrate treatment method and substrate treatment apparatusDAINIPPON SCREEN MFG·Filed 2013·Application pending·0 cites
- 4141US2024153779A1Substrate treatment method and substrate treatment deviceSCREEN HOLDINGS CO LTD·Filed 2022·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Yukifumi Yoshida files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →