Inventor · disambiguated record
Zhi (Lewis) Liu
Also filed as: LIU ZHI · LIU ZHI LEWIS
3 granted patents·2 pending applications·72 citations·filing 2005–2011
75Inventor score
Top patents by PatentIndex Score
5 records- 0192US7644512B1Systems and methods for drying a rotating substrateAKRION INC·Filed 2007·Granted Jan 12, 2010·49 cites·9 claims
- 0290US8056253B2Systems and methods for drying a rotating substrateLIU ZHI LEWIS·Filed 2010·Granted Nov 15, 2011·12 cites·7 claims
- 0389US8276291B2Systems and methods for drying a rotating substrateLIU ZHI LEWIS·Filed 2011·Granted Oct 2, 2012·11 cites·20 claims
- 0440US2006021634A1Method and apparatus for creating ozonated process solutions having high ozone concentrationLIU ZHI LEWIS·Filed 2005·Application pending·0 cites
- 0540US2006011214A1System and method for pre-gate cleaning of substratesLIU ZHI·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →