Inventor · disambiguated record
Zhao Liu
Also filed as: LIU ZHAO · LIU ZHAO-TIE
9 granted patents·4 pending applications·6 citations·filing 1997–2015
77Inventor score
Files withUNIV TSINGHUA7SHANGHAI MICROELECTRONICS EQUI3CHENGDU INSITUTE OF ORGANIC CH1ZHANG MING1ZHANG YU1
Top patents by PatentIndex Score
13 records- 0163US9903704B2Three-DOF heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Granted Feb 27, 2018·2 cites·6 claims
- 0256US9752643B2Negative stiffness system for gravity compensation of micropositionerSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Sep 5, 2017·1 cites·3 claims
- 0348US9869857B2Optical grating phase modulator for laser interference photoetching systemUNIV TSINGHUA·Filed 2014·Granted Jan 16, 2018·0 cites·4 claims
- 0444US2015326150A1Maglev workpiece table with six degrees of freedomUNIV TSINGHUA·Filed 2013·Application pending·0 cites
- 0543US9791789B2Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Oct 17, 2017·0 cites·4 claims
- 0642US9182217B2Method for measuring displacement of large-range moving platformUNIV TSINGHUA·Filed 2013·Granted Nov 10, 2015·0 cites·5 claims
- 0742US8958078B2Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in spaceZHANG MING·Filed 2012·Granted Feb 17, 2015·0 cites·2 claims
- 0842US2016138903A1Two-dof heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Application pending·0 cites
- 0941US2012284289A1Method and apparatus for previewing application subject contentZHANG YU·Filed 2012·Application pending·0 cites
- 1041US2015311099A1Wafer Stage Having Function of Anti-CollisionSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Application pending·0 cites
- 1140US9766054B2Planar motor rotor displacement measuring device and its measuring methodSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Sep 19, 2017·0 cites·3 claims
- 1234US9904183B2Coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Feb 27, 2018·0 cites·5 claims
- 1329US6022990AMethod for synthesizing methyl acrylateCHENGDU INSITUTE OF ORGANIC CH·Filed 1997·Granted Feb 8, 2000·3 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →