Inventor · disambiguated record
Zhiyu Pan
Also filed as: PAN ZHIYU
20 granted patents·3 pending applications·269 citations·filing 2002–2025
95Inventor score
Top patents by PatentIndex Score
23 records- 0197US7227432B2MEMS resonator array structure and method of operating and using sameBOSCH GMBH ROBERT·Filed 2005·Granted Jun 5, 2007·61 cites·35 claims
- 0295US7323952B2Breath-mode ring resonator structure, and method of designing, operating and using sameBOSCH GMBH ROBERT·Filed 2005·Granted Jan 29, 2008·40 cites·18 claims
- 0392US9003885B2Tri-axis accelerometer having a single proof mass and fully differential output signalsPAN ZHIYU·Filed 2013·Granted Apr 14, 2015·9 cites·23 claims
- 0490US7595708B2MEMS resonator array structureBOSCH GMBH ROBERT·Filed 2007·Granted Sep 29, 2009·17 cites·19 claims
- 0588US7757555B2Tri-axis accelerometer having a single proof mass and fully differential output signalsBOSCH GMBH ROBERT·Filed 2006·Granted Jul 20, 2010·14 cites·10 claims
- 0685US7777596B2MEMS resonator structure and methodBOSCH GMBH ROBERT·Filed 2007·Granted Aug 17, 2010·12 cites·41 claims
- 0784US7671515B2Microelectromechanical devices and fabrication methodsBOSCH GMBH ROBERT·Filed 2006·Granted Mar 2, 2010·13 cites·6 claims
- 0883US7907035B2MEMS resonator array structure and method of operating and using sameBOSCH GMBH ROBERT·Filed 2007·Granted Mar 15, 2011·10 cites·39 claims
- 0982US8418559B2Tri-axis accelerometer having a single proof mass and fully differential output signalsPAN ZHIYU·Filed 2010·Granted Apr 16, 2013·4 cites·14 claims
- 1082US7401517B2Dual-axis yaw rate sensing unit having a tuning fork gyroscope arrangementBOSCH GMBH ROBERT·Filed 2006·Granted Jul 22, 2008·15 cites·17 claims
- 1182US7319372B2In-plane mechanically coupled microelectromechanical tuning fork resonatorsUNIV LELAND STANFORD JUNIOR·Filed 2005·Granted Jan 15, 2008·15 cites·14 claims
- 1279US7026184B2Method of fabricating microstructures and devices made therefromUNIV CARNEGIE MELLON·Filed 2003·Granted Apr 11, 2006·41 cites·22 claims
- 1375US8222974B2MEMS resonator structure including regions with different densities and methodLUTZ MARKUS·Filed 2010·Granted Jul 17, 2012·4 cites·31 claims
- 1467US12324416B1Bait chasing systemPAN ZHIYU·Filed 2025·Granted Jun 10, 2025·0 cites·20 claims
- 1564US8324986B2MEMS resonator array structure and method of operating and using sameLUTZ MARKUS·Filed 2011·Granted Dec 4, 2012·2 cites·34 claims
- 1654US6901800B2Differential in-plane tunneling current sensorBOSCH GMBH ROBERT·Filed 2004·Granted Jun 7, 2005·5 cites·2 claims
- 1750US6856067B2Device and method for electrostatically levitating a disk and method for using an electrostatic levitated disk as a sensorBOSCH GMBH ROBERT·Filed 2003·Granted Feb 15, 2005·7 cites·30 claims
- 1849US7342703B2Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending actionBOSCH GMBH ROBERT·Filed 2007·Granted Mar 11, 2008·0 cites·16 claims
- 1949US2008180821A1Apparatus, method and system for providing enhanced mechanical protection of thin beamsNIENDORF ANDREAS·Filed 2008·Application pending·0 cites
- 2042US7177068B2Apparatus, method and system for providing enhanced mechanical protection for thin beamsBOSCH GMBH ROBERT·Filed 2002·Granted Feb 13, 2007·0 cites·16 claims
- 2139US6895818B2Differential in-plane tunneling current sensorBOSCH GMBH ROBERT·Filed 2002·Granted May 24, 2005·0 cites·22 claims
- 2239US2004231420A1Integrated monolithic tri-axial micromachined accelerometerFiled 2004·Application pending·0 cites
- 2336US2004118241A1Arrangement, method, and system to reduce the play of micro-mechanical produced gearsFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →