Inventor · name-matched record
CHIEN SHANG-CHIEH
6 granted patents·6 pending applications·0 citations·filing 2021–2025
67Inventor score
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
12 records- 0193US2026079405A1Euv radiation source apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0288US12560868B2System and method for omnidirectional real time detection of photolithography characteristicsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Feb 24, 2026·0 cites·20 claims
- 0388US2026089826A1Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0487US2026072363A1Methods of cleaning a lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0586US2026095978A1Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0684US2026036911A1EUV Lithography System With 3D Sensing And Tunning ModulesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0780US12591182B2Lithography contamination controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Mar 31, 2026·0 cites·20 claims
- 0878US12541152B2EUV lithography system with 3D sensing and tunning modulesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 3, 2026·0 cites·20 claims
- 0974US12572080B2Lithography system and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Mar 10, 2026·0 cites·20 claims
- 1067US2026099087A1Methods of manufacturing semiconductor device and extreme ultraviolet photolithography systemsTAIWAN SEMICONDUCTOR MFG COMPANY LTD·Filed 2024·Application pending·0 cites
- 1166US12520385B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jan 6, 2026·0 cites·20 claims
- 1264US12523937B2Protective ring structure for vacuum interface and method of using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jan 13, 2026·0 cites·13 claims
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Identity basis: exact name match across USPTO filings. How scoring works →