Inventor · name-matched record
EBATA SHINYA
2 granted patents·3 pending applications·0 citations·filing 2022–2025
27Inventor score
Files withKOKUSAI ELECTRIC CORP5
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
5 records- 0179US2026096361A1Method of manufacturing semiconductor device, method of processing substrate, recording medium, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
- 0277US2026015718A1Method of controlling vaporization system, method of manufacturing semiconductor device, vaporization system, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
- 0377US2026018408A1Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
- 0476US12540388B2Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2024·Granted Feb 3, 2026·0 cites·18 claims
- 0562US12518964B2Method of manufacturing semiconductor device, method of processing substrate, recording medium, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2022·Granted Jan 6, 2026·0 cites·23 claims
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Identity basis: exact name match across USPTO filings. How scoring works →