Inventor · name-matched record
MIRONOV ANDREY
2 granted patents·0 citations·filing 2019–2019
22Inventor score
Files withUNIV ILLINOIS2
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
2 records- 0150US12523933B2Photoresist-free photolithography, photoprocessing tools, and methods with VUV or deep-UV lampsUNIV ILLINOIS·Filed 2019·Granted Jan 13, 2026·0 cites·20 claims
- 0246US12565703B2Atomic layer deposition and vapor deposition reactor with in-chamber microplasma sourceUNIV ILLINOIS·Filed 2019·Granted Mar 3, 2026·0 cites·12 claims
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Identity basis: exact name match across USPTO filings. How scoring works →