Inventor · name-matched record
UEDA TATSUSHI
1 granted patent·1 pending application·0 citations·filing 2021–2025
5Inventor score
Technology areasH01J
Files withKOKUSAI ELECTRIC CORP2
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
2 records- 0175US2026011532A1Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
- 0253US12575347B2Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2021·Granted Mar 10, 2026·0 cites·13 claims
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Identity basis: exact name match across USPTO filings. How scoring works →