Inventor · disambiguated record

Arnaud Grevoz

Also filed as: GREVOZ ARNAUD

1 granted patent·240 citations·filing 1995–1995

56Inventor score

Technology areasG01B

Files withLUCENT TECHNOLOGIES INC1

Top patents by PatentIndex Score

1 record

0191US5739909AMeasurement and control of linewidths in periodic structures using spectroscopic ellipsometryLUCENT TECHNOLOGIES INC·Filed 1995·Granted Apr 14, 1998·240 cites·18 claims

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