Inventor · disambiguated record

Farid Seddighi

Also filed as: SEDDIGHI FARID

1 granted patent·13 citations·filing 2002–2002

35Inventor score

Technology areasG01N

Files withLAMBDA PHYSIK AG1

Top patents by PatentIndex Score

1 record

0169US6839375B1On-line quality control of the key optical components in lithography lasers using laser induced fluorescenceLAMBDA PHYSIK AG·Filed 2002·Granted Jan 4, 2005·13 cites·56 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →