US10115901B2ActiveUtilityPatentIndex 48
Mask assembly, apparatus, and method of manufacturing display device using the mask assembly
Est. expiryDec 18, 2035(~9.5 yrs left)· nominal 20-yr term from priority
H01L 27/3246H01L 51/56H01L 51/0011C23C 16/042H01L 2227/323H01L 27/3216H01L 51/001C23C 14/042H01L 51/5012H10K 71/166H10K 50/11H10K 59/35H10K 59/1201H10K 59/352H10K 71/164H10K 71/00H10K 59/122H10K 71/191
48
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20
References
7
Claims
Abstract
Provided is a mask assembly, an apparatus, and a method of manufacturing a display apparatus using such mask assembly and apparatus. The mask assembly deposits a deposition material on a first pixel among a plurality of pixels disposed on a device substrate and including the first pixel and a second pixel includes a mask substrate, a molding layer stacked on the mask substrate and including a hole corresponding to a position of the second pixel, a blocking plate detachably mounted in the hole and configured to block the second pixel from the deposition material by covering the second pixel when the blocking plate is detached from the hole.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1. A mask assembly, comprising:
a mask substrate configured to deposit a deposition material on a first pixel disposed on a device substrate comprising the first pixel and a second pixel;
a molding layer stacked on the mask substrate and comprising a hole corresponding to a position of the second pixel disposed on the device substrate; and
a blocking plate detachably mounted in the hole and configured to block the second pixel from the deposition material by covering the second pixel when the blocking plate is detached from the hole.
2. The mask assembly of claim 1 , wherein the mask substrate comprises a conductive material.
3. The mask assembly of claim 1 , wherein the molding layer comprises at least one of acrylic resin, polyimide (PI), benzocyclobutene (BCB), a non-photosensitive organic material layer, and a non-photosensitive inorganic material layer.
4. The mask assembly of claim 1 , wherein the hole extends to correspond to positions of a plurality of second pixels that are adjacent to each other and disposed on the device substrate, and
the blocking plate extends to cover the plurality of second pixels that are adjacent to each other when the blocking plate is detached from the hole.
5. The mask assembly of claim 1 , wherein the blocking plate comprises a conductive material.
6. The mask assembly of claim 1 , wherein the device substrate further comprises a first electrode, a pixel-defining layer partially exposing the first electrode, and a spacer protruding from the pixel-defining layer, and
the blocking plate comprises an accommodation hole that accommodates the spacer.
7. The mask assembly of claim 1 , wherein the device substrate comprises a first alignment key, and
the mask assembly comprises a second alignment key corresponding to the first alignment key.Cited by (0)
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