US10161046B2ActiveUtilityA1
Method for forming metal particle layer and light emitting device fabricated using metal particle layer formed by the method
Est. expiryJul 24, 2032(~6 yrs left)· nominal 20-yr term from priority
H01L 33/38C23C 18/44H01L 33/405C23C 18/48H01L 2933/0016C23C 18/165C23C 18/54H01L 2933/0091H10H 20/882H10H 20/831H10H 20/83H10H 20/81H10H 20/032H10H 20/835
45
PatentIndex Score
0
Cited by
16
References
12
Claims
Abstract
Disclosed is a method for forming a metal particle layer having irregular structures in a simpler manner. The method includes bringing a base into contact with an activation solution including a metal compound, an organic acid activator, and a complexing agent. The base is oxidized by the organic acid activator to produce electrons and the metal compound is reduced by the electrons to deposit metal particles on the surface of the base. Also disclosed is a method for fabricating a light emitting device with improved light extraction efficiency that uses a metal particle layer formed by the above method.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1. A method for forming a metal particle layer, the method comprising:
bringing a base into contact with an activation solution comprising a metal compound, an organic acid activator, and a complexing agent, wherein the base is oxidized by the organic acid activator to produce electrons and the metal compound is reduced by the electrons to deposit metal particles on a surface of the base, and
removing a metal oxide film formed when the base comes into contact with oxygen in air, before formation of the metal particle layer by using an aqueous solution of the organic acid activator,
wherein the activation solution further comprises an alkylene glycol monoalkyl ether.
2. The method according to claim 1 , wherein the metal particle layer has nanosized irregular structures.
3. The method according to claim 2 , wherein the irregularities have a height of 10 to 1,000 nm.
4. The method according to claim 1 , wherein the base comprises at least one element selected from the group consisting of indium, tin, zinc, aluminum, gallium, antimony, iridium, ruthenium, nickel, silver, and gold.
5. The method according to claim 4 , wherein the base comprises at least one element or compound selected from the group consisting of indium tin oxide (ITO), indium zinc oxide (IZO), indium zinc tin oxide (IZTO), indium aluminum zinc oxide (IAZO), indium gallium zinc oxide (IGZO), indium gallium tin oxide (IGTO), aluminum zinc oxide (AZO), antimony tin oxide (ATO), gallium zinc oxide (GZO), IrO x , RuO x , Ni, Ag, and Au.
6. The method according to claim 1 , wherein the metal particle layer is formed by dipping the base in the activation solution once or more.
7. The method according to claim 1 , wherein the metal compound comprises at least one compound selected from the group consisting of metal salts, metal oxides, and metal hydrates comprising palladium, silver, gold, copper, gallium, titanium, tantalum, ruthenium, tin, platinum or an alloy thereof.
8. The method according to claim 1 , wherein the concentration of the metal compound in the activation solution is from 0.001 to 5 g/L.
9. The method according to claim 1 , wherein the organic acid activator is an organic acid having 1 to 10 carbon atoms.
10. The method according to claim 1 , wherein the organic acid activator comprises at least one organic acid selected from the group consisting of citric acid, oxalic acid, malonic acid, malic acid, tartaric acid, acetic acid, fumaric acid, lactic acid, formic acid, propionic acid, butyric acid, iminodiacetic acid, glyoxylic acid, and ascorbic acid.
11. The method according to claim 1 , wherein the organic acid activator is an aliphatic polycarboxylic acid having 2 to 10 carbon atoms.
12. The method according to claim 1 , wherein the complexing agent comprises at least one compound selected from the group consisting of HCl, HF, and NHF 3 .Cited by (0)
No later patents cite this yet.
References (0)
No backward citations on record.