Battery, a battery element and a method for forming a battery

Abstract

A battery, a battery element and a method for forming a battery element are provided. In an embodiment, a battery element includes a substrate with a plurality of trenches extending into the substrate, wherein a part of a trench of the plurality of trenches is filled with a solid state battery structure, and wherein the trench of the plurality of trenches comprises a cavity.

What is claimed is: 
     
       1. A method for forming a battery, the method comprising:
 providing a wafer comprising at least two wafer electrodes, wherein the wafer comprises a plurality of trenches extending from a surface of the wafer into the wafer, wherein at least a part of a trench of the plurality of trenches is filled with a solid state battery structure, wherein the solid state battery structures within the trenches comprise electrodes electrically connected to the wafer electrodes; and 
 forming a battery package comprising two externally accessible battery electrodes to provide a supply voltage to a connectable device, wherein the two externally accessible battery electrodes reach through the battery package. 
 
     
     
       2. The method of  claim 1 , further comprising separating the wafer to obtain a remaining part of the wafer with a desired geometry, wherein the remaining part of the wafer is at least more than half of a front side of the wafer and comprises the two wafer electrodes. 
     
     
       3. A method for forming a battery, the method comprising:
 providing a wafer; 
 removing a portion of the wafer to form a substrate so that the substrate includes at least half of a front side of the wafer; 
 forming at least two wafer electrodes in the substrate, wherein the substrate with the wafer electrodes comprises a plurality of trenches extending into the substrate, wherein at least a part of a trench of the plurality of trenches is filled with a solid state battery structure; and 
 forming at least two externally accessible battery electrodes to provide a supply voltage of the battery, wherein the solid state battery structure within the trench comprises electrodes electrically connected to the wafer electrodes. 
 
     
     
       4. The method of  claim 3 , wherein the at least half of the front side of the wafer comprises at least 70% of the front side of the wafer. 
     
     
       5. The method of  claim 3 , wherein the at least half of the front side of the wafer comprises at least 80% of the front side of the wafer. 
     
     
       6. The method of  claim 3 , wherein the at least half of the front side of the wafer comprises at least 90% of the front side of the wafer. 
     
     
       7. The method of  claim 3 , wherein the substrate is cut so that the substrate has a quadratic shape. 
     
     
       8. The method of  claim 3 , wherein the substrate is cut so that the substrate has a rectangular shape. 
     
     
       9. The method of  claim 3 , wherein the substrate further includes a control circuit and electrically connected to the two wafer electrodes. 
     
     
       10. The method of  claim 3 , further comprising encapsulating the substrate with a battery package. 
     
     
       11. The method of  claim 10 , further comprising a control circuit disposed on a separate die and located within the battery package, and electrically connected to the two externally accessible battery electrodes. 
     
     
       12. The method of  claim 3 , wherein the substrate comprises a semiconductor material or a glass material. 
     
     
       13. The method of  claim 3 , wherein the substrate comprises a first wafer electrode of the two wafer electrodes at a front side of the substrate and a second wafer electrode of the two wafer electrodes at a back side of the substrate. 
     
     
       14. The method of  claim 3 , wherein the trenches are etched with a crystal orientation depending etch. 
     
     
       15. The method of  claim 3 , wherein the trenches have a quadratic pattern. 
     
     
       16. The method of  claim 3 , wherein the trenches have a hexagonal pattern.