Valve, in particular vacuum valve

Abstract

A valve ( 1 ), in particular a vacuum valve, having at least one valve housing ( 2 ), at least one closure element ( 3 ), and at least one valve seat ( 4 ). The valve seat ( 4 ) surrounds at least one valve opening ( 5 ) of the valve ( 1 ), and the closure element ( 3 ) can be moved back and forth between at least one open position, in which the closure element ( 3 ) at least partly releases the valve opening ( 5 ), and a closed position, in which a sealing surface ( 8 ) of the closure element ( 3 ) is pressed against the valve seat ( 4 ) in order to close the valve opening ( 5 ), by at least one closure element drive ( 6, 7 ). At least one surface ( 9 ) of the valve ( 1 ) has an average surface roughness RZ less than or equal to 0.4 um, preferably less than or equal to 0.25 um.

The invention claimed is: 
     
       1. A valve, comprising at least one valve housing, at least one closure member, and at least one valve seat, wherein the valve seat surrounds at least one valve opening of the valve, at least one closure member drive that moves the closure member back and forth between at least one open position, in which the closure member at least partially clears the valve opening, and a closed position, in which the closure member is pressed against the valve seat by way of a sealing surface of the closure member in order to close the valve opening, and at least one surface of the valve has an average roughness depth RZ less than or equal to 0.4 μm and has a reflectance for electromagnetic radiation of at least 0.8. 
     
     
       2. The valve as claimed in  claim 1 , wherein the surface is a surface that is at least one of milled or turned to at least one of a shiny finish or optically reflective surface. 
     
     
       3. The valve as claimed in  claim 1 , wherein the surface is formed of aluminum or of an aluminum alloy or of stainless steel or includes such a material. 
     
     
       4. The valve as claimed in  claim 3 , wherein the surface is formed of a 5000 or 6000 series aluminum alloy or includes such a material. 
     
     
       5. The valve as claimed in  claim 1 , wherein the surface is formed on at least one of the valve seat or on the sealing surface of the closure member. 
     
     
       6. The valve as claimed in  claim 5 , wherein, in the closed position, a seal of the valve is pressed against the surface, and the seal is raised from the surface in the open position. 
     
     
       7. The valve as claimed in  claim 1 , wherein the surface is formed on a sealing seat of the valve, and a seal is permanently pressed against said sealing seat during operation of the valve. 
     
     
       8. The valve as claimed in  claim 1 , wherein the surface is formed at least in a subregion of at least one of the valve housing or of the closure member that comes into contact with process fluids during operation of the valve. 
     
     
       9. A method for producing a valve as claimed in  claim 1 , the method comprising at least one of milling or turning the surface to a shiny finish. 
     
     
       10. The valve as claimed in  claim 1 , wherein the valve is a vacuum valve.