Actuator for moving an optoelectronic device

Abstract

An actuator for moving a platform having electrical connections is provided. The actuator includes an outer frame connected to an inner frame by one or more spring elements that are electrically conductive. The actuator further includes one or more comb drive actuators that apply a controlled force between the outer frame and the inner frame. Each of the comb drive actuators includes one or more comb drives. Moreover, a method for moving a platform having electrical connections is also provided. The method includes connecting an outer frame to an inner frame using one or more spring elements that are electrically conductive. The method further includes generating a controlled force using one or more comb drive actuators. Each of the comb drive actuators includes one or more comb drives. In addition, the method includes applying the controlled force between the outer frame and the inner frame.

What is claimed is: 
     
       1. A packaged actuator, comprising:
 a circuit board; 
 a MEMS actuator that is substantially planar in a plane, wherein the MEMS actuator is configured to move in two linear degrees of freedom in the plane and in one rotational degree of freedom in the plane, wherein the MEMS actuator comprises one or more comb drive actuators that apply a controlled force to a central anchor, wherein the controlled force comprises a first force component and a second force component, wherein the first force component and the second force component are substantially orthogonal, wherein each of the comb drive actuators comprises one or more comb drives and an outer frame connected to an inner frame by one or more spring elements that are electrically conductive; 
 an optoelectronic device mounted on the MEMS actuator; and 
 a cover that encapsulates the MEMS actuator and the optoelectronic device, the cover comprising a window that is attached to the circuit board. 
 
     
     
       2. The packaged actuator of  claim 1 , wherein the central anchor is mechanically fixed with respect to the outer frame. 
     
     
       3. The packaged actuator of  claim 1 , wherein the optoelectronic device is attached to the central anchor. 
     
     
       4. The packaged actuator of  claim 1 , wherein the window is attached to the circuit board via a plastic frame. 
     
     
       5. The packaged actuator of  claim 1 , wherein the window comprises optical filter characteristics.