US10541166B2ActiveUtilityA1
Positioning apparatus
Est. expiryDec 12, 2033(~7.4 yrs left)· nominal 20-yr term from priority
H10P 72/7602H10P 72/3411H10P 72/3402H10P 72/0606H10P 72/50H10P 72/32Y10T29/49998H01L 21/67778H01L 21/67703H01L 21/68H01L 21/67766H01L 21/67259H01L 21/68707
50
PatentIndex Score
0
Cited by
48
References
20
Claims
Abstract
A method includes moving a sensor and an article at a first speed to position the sensor into a reference position relative to an article fixture. The sensor and the article are moved at a second speed as the sensor approaches the reference position. It is determined when the sensor is in the reference position, wherein the sensor is configured to be in the reference position when a contact is established between the sensor and a surface of the article fixture. The article is moved by a predetermined increment relative to the reference position to position the article in a target position in response to determining that the sensor is in the reference position.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1. A method comprising:
moving a loading arm, a sensor mounted on the loading arm, and an article held by the loading arm at a first speed to position the sensor into a reference position relative to an article fixture;
moving the sensor and the article at a second speed as the sensor approaches the reference position;
determining when the sensor is in the reference position, wherein
the sensor is configured to be in the reference position when a contact is established between the sensor and a surface of the article fixture, and
the contact is a direct contact between the sensor and the surface of the article fixture; and
after the contact is established between the sensor and the surface of the article fixture, further moving the article by a predetermined increment relative to the reference position to position the article in a target position in response to determining that the sensor is in the reference position.
2. The method of claim 1 , wherein moving at the first speed is faster in comparison to moving at the second speed.
3. The method of claim 1 , wherein determining when the sensor is in the reference position includes determining when a portion of the sensor comes into contact with a portion of the article fixture.
4. The method of claim 1 , further comprising moving the sensor by the predetermined increment in response to determining that the sensor is in the reference position.
5. The method of claim 4 , wherein moving the sensor by the predetermined increment includes removing the contact between the sensor and the article fixture.
6. The method of claim 1 , wherein
the reference position is coincident with the target position, and
the predetermined increment is null.
7. The method of claim 1 , further comprising absorbing an overtravel by a sensor arm as the sensor is moved into the reference position.
8. A method comprising:
moving a loading arm, a sensor mounted on the loading arm, and an article held by the loading arm at a first speed to position the sensor into a reference position relative to an article fixture;
moving the sensor and the article at a second speed as the sensor approaches the reference position;
determining when the sensor is in the reference position; and
after contact is established between the sensor the article fixture, further moving the article by a predetermined increment relative to the reference position to position the article in a target position in response to determining that the sensor is in the reference position, wherein the contact is a direct contact between the sensor and the article fixture.
9. The method of claim 8 , wherein moving at the first speed is faster in comparison to moving at the second speed.
10. The method of claim 8 , wherein determining when the sensor is in the reference position includes determining when a portion of the sensor comes into contact with a portion of the article fixture.
11. The method of claim 8 , further comprising moving the sensor by the predetermined increment in response to determining that the sensor is in the reference position.
12. The method of claim 11 , wherein moving the sensor by the predetermined increment includes removing the contact between the sensor and the article fixture.
13. The method of claim 8 , wherein positioning the sensor in the reference position includes establishing contact between the sensor and a portion of the article fixture.
14. The method of claim 8 , wherein
the reference position is coincident with the target position, and
the predetermined increment is null.
15. A method comprising:
moving a loading arm, a sensor mounted on the loading arm, and an article held by the loading arm to position the sensor into a reference position relative to an article fixture;
determining when the sensor is in the reference position, wherein
the sensor is configured to be in the reference position when a contact is established between the sensor and a surface of the article fixture, and
the contact is a direct contact between the sensor and the surface of the article fixture; and
after the contact is established between the sensor and the surface of the article fixture, further moving the article by a predetermined increment relative to the reference position to position the article in a target position in response to determining that the sensor is in the reference position.
16. The method of claim 15 , wherein determining when the sensor is in the reference position includes determining when a portion of the sensor comes into contact with a portion of the article fixture.
17. The method of claim 15 , further comprising moving the sensor by the predetermined increment in response to determining that the sensor is in the reference position.
18. The method of claim 17 , wherein moving the sensor by the predetermined increment includes removing the contact between the sensor and the article fixture.
19. The method of claim 15 , wherein
the reference position is coincident with the target position, and
the predetermined increment is null.
20. The method of claim 15 , further comprising absorbing an overtravel by a sensor arm as the sensor is moved into the reference position.Cited by (0)
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