Imprint apparatus, and method of manufacturing article

Abstract

The present invention provides an imprint apparatus for performing an imprint process which includes molding of imprint material on a substrate with a mold and releasing of the mold from the molded imprint material, the apparatus including a substrate holder configured to hold the substrate, a mold holder configured to hold the mold, a driving device configured to perform driving, for the releasing of the mold, of at least one of the substrate holder and the mold holder, and a detector configured to detect completion of the releasing of the mold by the driving device.

The invention claimed is: 
     
       1. An imprint apparatus for performing an imprint process which includes molding of imprint material on a substrate with a mold and releasing of the mold from the molded imprint material, the apparatus comprising:
 a substrate holder configured to hold the substrate; 
 a mold holder configured to hold the mold; 
 a driving device configured to perform driving, for the releasing of the mold, of at least one of the substrate holder and the mold holder; 
 a detector configured to detect whether a light has passed between the substrate holder and the mold holder; and 
 a controller configured to determine whether the releasing of the mold has been completed by the driving device in a state in which the substrate does not stick to the mold via the molded imprint material based on a detection result obtained by the detector. 
 
     
     
       2. The apparatus according to  claim 1 , wherein in a case where the controller determines that the releasing of the mold has not been completed, the controller is configured to cause the driving device to perform the driving for the releasing of the mold again. 
     
     
       3. The apparatus according to  claim 2 , wherein the controller is configured to make, during the driving for the releasing of the mold again, a force, with which the substrate holder holds the substrate, larger than that during the last driving for the releasing of the mold. 
     
     
       4. The apparatus according to  claim 1 , wherein in a case where the controller determines that the releasing of the mold has not been completed, the controller is configured to cease the imprint process. 
     
     
       5. The apparatus according to  claim 1 , wherein the controller is configured to cancel attraction of the substrate by the substrate holder, during the driving for the releasing of the mold, with respect to a region on the substrate for which the imprint process is being performed. 
     
     
       6. An imprint apparatus for performing an imprint process which includes molding of imprint material on a substrate with a mold and releasing of the mold from the molded imprint material, the apparatus comprising:
 a substrate holder configured to hold the substrate; 
 a mold holder configured to hold the mold; 
 a driving device configured to perform driving, for the releasing of the mold, of at least one of the substrate holder and the mold holder; 
 a detector configured to detect a position of a surface of the substrate in a direction perpendicular to a holding surface of the substrate holder, the detected position of the surface of the substrate being a portion of the surface of the substrate that is disposed outside a region of the substrate in which the imprint process is being performed; and 
 a controller configured to determine whether the releasing of the mold has been completed by the driving device in a state in which the substrate does not stick to the mold via the molded imprint material based on the position of the surface of the substrate detected by the detector. 
 
     
     
       7. The apparatus according to  claim 6 , wherein in a case where the controller determines that the releasing of the mold has not been completed, the controller is configured to cause the driving device to perform the driving for the releasing of the mold again. 
     
     
       8. The apparatus according to  claim 6 , wherein in a case where the controller determines that the releasing of the mold has not been completed, the controller is configured to cease the imprint process. 
     
     
       9. The apparatus according to  claim 6 , wherein the controller is configured to cancel attraction of the substrate by the substrate holder, during the driving for the releasing of the mold, with respect to a region on the substrate for which the imprint process is being performed. 
     
     
       10. An imprint apparatus for performing an imprint process which includes molding of imprint material on a substrate with a mold and releasing of the mold from the molded imprint material, the apparatus comprising:
 a substrate holder configured to hold the substrate; 
 a mold holder configured to hold the mold; 
 a driving device configured to perform driving, for the releasing of the mold, of at least one of the substrate holder and the mold holder; 
 a detector configured to obtain image data by taking an image of a surface of the substrate that is disposed outside a region of the substrate in which the imprint process is being performed; and 
 a controller configured to determine whether the releasing of the mold has been completed by the driving device in a state in which the substrate does not stick to the mold via the molded imprint material based on the image data obtained by the detector. 
 
     
     
       11. The apparatus according to  claim 10 , wherein in a case where the controller determines that the releasing of the mold has not been completed, the controller is configured to cause the driving device to perform the driving for the releasing of the mold again. 
     
     
       12. The apparatus according to  claim 10 , wherein in a case where the controller determines that the releasing of the mold has not been completed, the controller is configured to cease the imprint process. 
     
     
       13. The apparatus according to  claim 10 , wherein the controller is configured to cancel attraction of the substrate by the substrate holder, during the driving for the releasing of the mold, with respect to a region on the substrate for which the imprint process is being performed. 
     
     
       14. An imprint apparatus for performing an imprint process which includes molding of imprint material on a substrate with a mold and releasing of the mold from the molded imprint material, the apparatus comprising:
 a substrate holder configured to hold the substrate; 
 a mold holder configured to hold the mold; 
 a driving device configured to perform driving, for the releasing of the mold, of at least one of the substrate holder and the mold holder; 
 a vacuum line configured to cause the substrate holder to hold the substrate; 
 a detector configured to detect a gas pressure in the vacuum line; and 
 a controller configured to determine whether the releasing of the mold has been completed by the driving device in a state in which the substrate does not stick to the mold via the molded imprint material based on the gas pressure in the vacuum line detected by the detector. 
 
     
     
       15. The apparatus according to  claim 14 , wherein in a case where the controller determines that the releasing of the mold has not been completed, the controller is configured to cause the driving device to perform the driving for the releasing of the mold again. 
     
     
       16. The apparatus according to  claim 14 , wherein in a case where the controller determines that the releasing of the mold has not been completed, the controller is configured to cease the imprint process. 
     
     
       17. The apparatus according to  claim 14 , wherein the controller is configured to cancel attraction of the substrate by the substrate holder, during the driving for the releasing of the mold, with respect to a region on the substrate for which the imprint process is being performed. 
     
     
       18. An imprint apparatus for performing an imprint process which includes molding of imprint material on a substrate with a mold and releasing of the mold from the molded imprint material, the apparatus comprising:
 a substrate holder configured to hold the substrate; 
 a mold holder configured to hold the mold; 
 a driving device configured to perform driving, for the releasing of the mold, of at least one of the substrate holder and the mold holder; 
 a detector configured to detect whether a light has passed between the substrate holder and the mold holder; and 
 a controller configured to determine whether the substrate sticks to the mold via the molded imprint material based on a detection result obtained by the detector. 
 
     
     
       19. An imprint apparatus for performing an imprint process which includes molding of imprint material on a substrate with a mold and releasing of the mold from the molded imprint material, the apparatus comprising:
 a substrate holder configured to hold the substrate; 
 a mold holder configured to hold the mold; 
 a driving device configured to perform driving, for the releasing of the mold, of at least one of the substrate holder and the mold holder; 
 a detector configured to detect a position of a surface of the substrate in a direction perpendicular to a holding surface of the substrate holder, the detected position of the surface of the substrate being a portion of the surface of the substrate that is disposed outside a region of the substrate in which the imprint process is being performed; and 
 a controller configured to determine whether the substrate sticks to the mold via the molded imprint material based on the position of the surface of the substrate detected by the detector. 
 
     
     
       20. An imprint apparatus for performing an imprint process which includes molding of imprint material on a substrate with a mold and releasing of the mold from the molded imprint material, the apparatus comprising:
 a substrate holder configured to hold the substrate; 
 a mold holder configured to hold the mold; 
 a driving device configured to perform driving, for the releasing of the mold, of at least one of the substrate holder and the mold holder; 
 a detector configured to obtain image data by taking an image of a surface of the substrate that is disposed outside a region of the substrate in which the imprint process is being performed; and 
 a controller configured to determine whether the substrate sticks to the mold via the molded imprint material based on the image data obtained by the detector. 
 
     
     
       21. An imprint apparatus for performing an imprint process which includes molding of imprint material on a substrate with a mold and releasing of the mold from the molded imprint material, the apparatus comprising:
 a substrate holder configured to hold the substrate; 
 a mold holder configured to hold the mold; 
 a driving device configured to perform driving, for the releasing of the mold, of at least one of the substrate holder and the mold holder; 
 a vacuum line configured to cause the substrate holder to hold the substrate; 
 a detector configured to detect a gas pressure in the vacuum line; and 
 a controller configured to determine whether the substrate sticks to the mold via the molded imprint material based on the gas pressure in the vacuum line detected by the detector.