US10629812B2ActiveUtilityA1

Electrode, method for manufacturing the same, and organic light emitting diode display including the same

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Assignee: SAMSUNG DISPLAY CO LTDPriority: Jul 7, 2015Filed: Jul 16, 2018Granted: Apr 21, 2020
Est. expiryJul 7, 2035(~9 yrs left)· nominal 20-yr term from priority
H01L 51/0037H01L 51/5234H01L 51/5215Y02E10/549H01L 51/0022H01L 51/56H01L 51/0021Y02P70/521H01L 51/003H01L 51/442H01L 2251/301H01L 27/3244H10K 59/80524H10K 59/80517H10K 59/12H10K 71/60H10K 30/82H10K 85/1135H10K 71/611H10K 2102/00H10K 71/00H10K 50/828H10K 71/80H10K 50/816Y02P70/50
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Claims

Abstract

An electrode includes: a polymer layer including a non-conductive material; a conductive nanomaterial embedded in a top surface of the polymer layer; and a planarization layer on the polymer layer and on the conductive nanomaterial. The planarization layer includes a conductive material and a surfactant.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A method of manufacturing an electrode comprising:
 forming a sacrificial layer comprising a hydrophobic material on a substrate; 
 forming a planarization layer comprising a conductive material and a surfactant on the sacrificial layer; 
 coating a conductive nanomaterial on the planarization layer to have at least a portion of the conductive nanomaterial be exposed out of the planarization layer; 
 forming a polymer layer by coating and curing a curable polymer on the planarization layer and on the conductive nanomaterial to have the exposed portion of the conductive nanomaterial be embedded in the polymer layer; and 
 removing the substrate. 
 
     
     
       2. The method of  claim 1 , wherein the planarization layer further comprises:
 polyethylenedioxythiophene:polystyrenesulfonate (PEDOT:PSS); and 
 a fluorine-based surfactant. 
 
     
     
       3. The method of  claim 2 , wherein the conductive nanomaterial comprises a metal nanowire comprising at least one of silver (Ag), copper (Cu), gold (Au), platinum (Pt), palladium (Pd), chromium (Cr), nickel (Ni), or aluminum (Al). 
     
     
       4. The method of  claim 3 , wherein the sacrificial layer comprises at least one of polymethyl methacrylate (PMMA), a photosensitive polymer (PR), or polyvinyl phenol (PVP). 
     
     
       5. The method of  claim 4 , wherein the curable polymer is cured by heat treatment for about 90 min. to about 150 min. at about 65° C. to about 75° C. 
     
     
       6. The method of  claim 4 , wherein the polymer layer comprises at least one of polyimide (PI), polyethylene terephthalate (PET), polyethersulfone (PES), polyethylene naphthalate (PEN), polycarbonate (PC), polymethyl methacrylate (PMMA), polyvinyl alcohol (PVA), triacetyl cellulose (TAC), polystyrene (PS), polyether imide (PEI), polydimethylsiloxane (PDMS), a silicone resin, a fluorine resin, or an epoxy resin.

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