Target assembly, apparatus incorporating same, and method for manufacturing same

Abstract

A target assembly for generating radiation may comprise a target, a substrate and a window. The target may be capable of generating first radiation when impinged by a beam. The window may be at least partially permeable to the beam. The window and the substrate may form at least part of a hermetically sealed chamber and the target may be positioned in the chamber. The chamber may be filled with air having a normal or reduced content of oxygen.

What is claimed is: 
     
       1. A method for manufacturing a target assembly, comprising:
 providing a substrate; 
 positioning a target on the substrate, wherein the target plate is capable of generating radiation when impinged by a beam; 
 installing a window plate onto the substrate under the atmospheric air to build a preliminary target assembly, wherein the window plate and the substrate forms at least part of a hermetically sealed chamber and the window plate is at least partially permeable to the beam; and 
 heating the preliminary target assembly to a temperature approximate to a proposed working temperature of the target assembly. 
 
     
     
       2. The method of  claim 1 , the installing the window plate onto the substrate under the atmospheric air including:
 causing the window plate to curve away from the substrate; and 
 installing the curved window plate onto the substrate under a prevailing environmental condition, wherein the chamber formed by the window plate and the cavity contains ambient air. 
 
     
     
       3. The method of  claim 2 , the causing the window plate to curve away from the substrate including:
 applying a negative pressure to a surface of the window plate. 
 
     
     
       4. The method of  claim 2 , wherein the prevailing environmental condition is approximate to the standard temperature and pressure. 
     
     
       5. The method of  claim 1 , wherein the proposed working temperature of the target assembly is over 1100 degrees Celsius. 
     
     
       6. The method of  claim 1 , wherein the installing of the window plate is without vacuuming air.