Metal plate for laser processing and method for producing stainless steel plate for laser processing

Abstract

A metal plate for laser processing (such as a stainless steel plate or a titanium plate) and preferably an austenitic stainless steel plate suitable for use as a metal mask or the like which undergoes fine processing with a laser has an average grain diameter d (μm) and a plate thickness t (μm) which satisfy the equation d≤0.0448·t−1.28.

The invention claimed is: 
     
       1. A method of making a metal mask comprising:
 providing a metal plate selected from an austenitic stainless steel plate, a ferritic stainless steel plate, and a titanium plate, the metal plate having a centerline surface roughness of at most 0.16 μm, a plate thickness t of at most 400 μm, and an average grain diameter d, wherein the plate thickness t and average grain diameter d satisfy the following Equation (1):
     d≤ 0.0448· t− 1.28  (1);
 
 
 
       where a unit of d and t is μm;
 cutting the metal plate into a metal mask using a laser beam so that a pattern of holes or slits is formed in the metal mask; 
 the metal plate having a spreading value of at most 10% of the plate thickness wherein the spreading value is determined by subtracting a cut width of the hole or slit in a surface of the metal plate on an exit side of the laser beam from a cut width of the hole or slit in a surface of the metal plate on an incident side of the laser beam.