Substrate holding device, substrate transport device, processing arrangement and method for processing a substrate

Abstract

In accordance with various embodiments, provision is made of a substrate holding device, wherein the latter may comprise a carrier plate with a recess, the recess extending from an upper side of the carrier plate to a lower side of the carrier plate through the carrier plate, a holding frame, which has a frame opening and a support area, surrounding the frame opening, for holding a substrate in the recess, wherein the holding frame inserted into the recess lies on the carrier plate in sections.

What is claimed is: 
     
       1. A substrate transportation system comprising a substrate holding device and a transportation device for transporting the substrate holding device, wherein the substrate holding device comprises:
 a carrier plate comprising a cavity, wherein the cavity extends from an upper side of the carrier plate through the carrier plate to a lower side of the carrier plate; 
 a holding frame, which has a frame opening and a supporting surface for holding a substrate in the cavity, wherein the substrate is directly supported on the supporting surface, said supporting surface at least partially surrounding the frame opening, wherein the cavity is substantially cuboid shaped and has four corner regions, and wherein the holding frame rests on the carrier plate only in the corner regions of the cavity; 
 wherein the holding frame, when inserted into the cavity, partially rests on the carrier plate; and 
 two holding regions at which the carrier plate can be supported for transporting the carrier plate, wherein the cavity is disposed between the two holding regions; 
 
       wherein the transportation device has two holding elements in such a manner that the carrier plate of the substrate holding device is held only in the two holding regions. 
     
     
       2. The substrate transportation system according to  claim 1 , the substrate holding device further comprising:
 a further holding frame, which partially rests on the holding frame. 
 
     
     
       3. The substrate transportation system according to  claim 2 ,
 wherein the holding frame and the further holding frame are adapted in such a manner that a receiving space for receiving a peripheral portion of the substrate is provided between the holding frame and the further holding frame, when disposed in the cavity. 
 
     
     
       4. The substrate transportation system according to  claim 2 ,
 wherein the further holding frame has a further supporting surface for holding a further substrate above the substrate. 
 
     
     
       5. The substrate transportation system according to  claim 2 ,
 wherein the holding frame and the further holding frame are adapted in such a manner that they mutually engage in a form-fitting manner when the further holding frame is placed on the holding frame. 
 
     
     
       6. The substrate transportation system according to  claim 5 ,
 wherein the holding frame and the further holding frame comprise a plurality of centering structures that mutually match in pairs, such that the holding frame and the further holding frame are centered to each other when the further holding frame is placed onto the holding frame. 
 
     
     
       7. The substrate transportation system according to  claim 2 ,
 wherein a respective inner circumferential wall of the holding frame and the further holding frame has a chamfer. 
 
     
     
       8. The substrate transportation system according to  claim 2 , the substrate holding device further comprising:
 another further holding frame, wherein the another further holding frame, when inserted into the cavity, is disposed above the further holding frame in such a manner that a receiving space for receiving a peripheral portion of a further substrate is provided between the another further holding frame and the further holding frame. 
 
     
     
       9. The substrate transportation system according to  claim 2 , the substrate holding device further comprising:
 a vent opening for evacuating a gap between the holding frame and the further holding frame. 
 
     
     
       10. The substrate transportation system according to  claim 2 ,
 wherein the holding frame and the further holding frame, in a manner so as to match the cavity, comprise a substantially cuboid shaped external contour comprising four external corner portions, and wherein the holding frame and the further holding frame in the four external corner portions each comprise centering structures that mutually match in pairs. 
 
     
     
       11. The substrate transportation system according to  claim 1 , the holding frame furthermore comprising:
 a recess, which is adjacent to the supporting surface and surrounds the latter at least partially. 
 
     
     
       12. The substrate transportation system according to  claim 11 ,
 wherein the recess is adjacent to an inner circumferential wall of the holding frame. 
 
     
     
       13. The substrate transportation system according to  claim 1 ,
 wherein the supporting surface is planar. 
 
     
     
       14. The substrate transportation system according to  claim 1 ,
 wherein the holding frame comprises or is formed from a metal. 
 
     
     
       15. The substrate transportation system according to  claim 1 ,
 wherein the holding frame comprises or is formed from a plastics material or a composite material; or 
 wherein the holding frame comprises or is formed from the plastics material and the composite material. 
 
     
     
       16. A processing assembly comprising:
 a processing chamber for processing both sides of a plurality of substrates in a processing region of the processing chamber; and 
 a substrate transportation system for transporting or positioning the plurality of substrates in the processing region; 
 the substrate transportation system comprising a substrate holding device and a transportation device for transporting the substrate holding device, wherein the substrate holding device comprises:
 a carrier plate comprising a cavity, wherein the cavity extends from an upper side of the carrier plate through the carrier plate to a lower side of the carrier plate; 
 a holding frame, which has a frame opening and a supporting surface for holding a substrate in the cavity, wherein the substrate is directly supported on the supporting surface, said supporting surface at least partially surrounding the frame opening, wherein the cavity is substantially cuboid shaped and has four corner regions, and wherein the holding frame rests on the carrier plate only in the corner regions of the cavity; 
 wherein the holding frame, when inserted into the cavity, partially rests on the carrier plate; and 
 two holding regions at which the carrier plate can be supported for transporting the carrier plate, wherein the cavity is disposed between the two holding regions; 
 wherein the transportation device has two holding elements in such a manner that the carrier plate of the substrate holding device is held only in the two holding regions. 
 
 
     
     
       17. The processing assembly according to  claim 16 , furthermore comprising:
 two processing devices, wherein the transportation device is adapted for transporting or positioning the substrate holding device between the two processing devices. 
 
     
     
       18. A method for processing a substrate, the method comprising the following steps:
 inserting a holding frame for holding the substrate into a cavity in a carrier plate, wherein the holding frame has a supporting surface for supporting the substrate, wherein the cavity is substantially cuboid shaped and has four corner regions, and wherein the holding frame rests on the carrier plate only in the corner regions of the cavity; 
 placing the substrate onto the supporting surface of the holding frame, wherein the substrate is directly supported on the supporting surface; 
 
       and
 processing the substrate by a processing device through a frame opening while it is held in the cavity by means of the holding frame, wherein the processing device faces the frame opening; 
 transporting the carrier plate, wherein the carrier plate is held only in two holding regions, between which the cavity is disposed. 
 
     
     
       19. A substrate holding device comprising:
 a carrier plate extending laterally; 
 two supporting regions that are laterally next to each other and extend parallel to each other at which the substrate holding device can be supported in order for the latter to be transported; and 
 a plurality of substrate placement regions that are disposed between the two supporting regions, each of said substrate placement regions comprising a cavity, which from an upper side of the carrier plate extends through the carrier plate to a lower side of the carrier plate, and each of said substrate placement regions comprising a holding frame which has a frame opening and a supporting surface for holding a substrate in the cavity, wherein the substrate is directly supported on the supporting surface, said supporting surface at least partially surrounding the frame opening; 
 wherein the holding frame, when inserted into the cavity, partially rests on the carrier plate, wherein the cavity is substantially cuboid shaped and has four corner regions, and wherein the holding frame rests on the carrier plate only in the corner regions of the cavity.