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US10837752B2ActiveUtilityPatentIndex 70

Method for capturing dynamic vibrations of a roughness sensor, method for measuring a roughness of a workpiece surface, computer program product and measuring device configured to carry out the methods

Assignee: ZEISS CARL INDUSTRIELLE MESSTECHNIK GMBHPriority: May 20, 2015Filed: Nov 17, 2017Granted: Nov 17, 2020
Est. expiryMay 20, 2035(~8.9 yrs left)· nominal 20-yr term from priority
Inventors:MAYINGER PHILIPP
G01B 11/30G01B 5/28G01B 5/008
70
PatentIndex Score
4
Cited by
51
References
14
Claims

Abstract

A method for capturing dynamic vibrations of a roughness sensor of a roughness measuring apparatus is provided. The movement of the roughness sensor relative to the roughness measuring apparatus and/or relative to a surface of a workpiece is captured by a measuring system in the frequency range below 100 Hz with a data capturing rate of greater than 100 Hz. The captured data of the relative movement are made available for further data processing in and/or stored. Moreover, a method for measuring the roughness of a workpiece surface is provided, in which the method for capturing the dynamic vibrations of a roughness sensor is used. In addition, a computer program product for controlling a roughness sensor of a roughness measuring apparatus in accordance with one of the methods is provided, and a roughness measuring device that is configured to carry out one of the methods.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A method for capturing dynamic vibrations of a roughness sensor of a roughness measuring apparatus, the method comprising:
 (a) capturing data representing a movement of the roughness sensor relative to at least one of the roughness measuring apparatus and relative to a surface of a workpiece to be measured by at least one measuring system with a data capturing rate larger than 100 Hz, and the movement of the roughness sensor being in a frequency range below 100 Hz; 
 (b) making the captured data of the movement of the roughness sensor available for further data processing; and 
 (c) storing the data representing the movement of the roughness sensor. 
 
     
     
       2. The method of  claim 1 , wherein the movement of the roughness sensor is captured in a frequency range below 20 Hz with a data capturing rate of greater than 200 Hz. 
     
     
       3. The method of  claim 2 , further comprising:
 (d) ascertaining characteristics for the movement of the roughness sensor based on a statistical evaluation of the captured data of the movement of the roughness sensor. 
 
     
     
       4. The method of  claim 3 , further comprising:
 (e) comparing the ascertained characteristics to predetermined threshold values for the movement of the roughness sensor, and 
 (f) generating a fault signal if the threshold values are exceeded. 
 
     
     
       5. A method for measuring a roughness of a workpiece surface by a roughness sensor of a roughness measuring apparatus, the method comprising:
 the method for capturing the dynamic vibrations of the roughness sensor of the roughness measuring apparatus according to  claim 3 ; 
 measuring the roughness of a surface portion of the workpiece surface by the roughness sensor; and 
 subsequently correcting data captured during the measuring of the roughness of the surface portion of the workpiece surface based on the characteristics ascertained simultaneously when capturing the dynamic vibrations of the roughness sensor to generate averaging-corrected roughness measurement values. 
 
     
     
       6. The method of  claim 1 , further comprising:
 (d) ascertaining characteristics for the movement of the roughness sensor based on a statistical evaluation of the captured data of the movement of the roughness sensor. 
 
     
     
       7. The method of  claim 6 , further comprising:
 (e) comparing the ascertained characteristics to predetermined threshold values for the movement of the roughness sensor, and 
 (f) generating a fault signal if the threshold values are exceeded. 
 
     
     
       8. A method for measuring a roughness of a workpiece surface by a roughness sensor of a roughness measuring apparatus, the method comprising:
 the method for capturing the dynamic vibrations of the roughness sensor of the roughness measuring apparatus according to  claim 6 ; 
 measuring the roughness of a surface portion of the workpiece surface by the roughness sensor; and 
 subsequently correcting data captured during the measuring of the roughness of the surface portion of the workpiece surface based on the characteristics ascertained simultaneously when capturing the dynamic vibrations of the roughness sensor to generate averaging-corrected roughness measurement values. 
 
     
     
       9. The method of  claim 8 , further comprising:
 ascertaining user information about the roughness of the workpiece surface based on the averaging-corrected roughness measurement values; and 
 outputting the ascertained user information about the roughness of the workpiece surface. 
 
     
     
       10. A method for measuring a roughness of a workpiece surface by a roughness sensor of a roughness measuring apparatus, the method comprising:
 the method for capturing dynamic vibrations of the roughness sensor of the roughness measuring apparatus according to  claim 1 ; 
 measuring a roughness of a surface portion of the workpiece surface by the roughness sensor; and 
 subsequently correcting data captured during the measuring of the roughness of the surface portion of the workpiece surface based on the captured data of the movement of the roughness sensor obtained simultaneously when capturing the dynamic vibrations of the roughness sensor to generate corrected roughness measurement values. 
 
     
     
       11. The method of  claim 10 , further comprising:
 ascertaining user information about the roughness of the workpiece surface based on the corrected roughness measurement values; and 
 outputting the ascertained user information about the roughness of the workpiece surface. 
 
     
     
       12. A non-transitory computer readable storage medium encoded with program code comprising computer executable instructions for controlling a roughness sensor of a roughness measuring apparatus and when executed operable to:
 (a) capture data representing a movement of the roughness sensor relative to at least one of the roughness measuring apparatus and a surface of a workpiece to be measured by at least one measuring system with a data capturing rate larger than 100 Hz, and the movement of the roughness sensor being in a frequency range below 100 Hz; 
 (b) make the captured data of the movement of the roughness sensor available for further data processing; and 
 (c) store the data representing the movement of the roughness sensor. 
 
     
     
       13. A roughness measuring apparatus comprising:
 a roughness sensor, 
 at least one measuring system configured to capture dynamic vibrations of the roughness sensor, 
 at least one of a control unit and an evaluation unit configured to: 
 (a) capture data representing a movement of the roughness sensor relative to at least one of the roughness measuring apparatus and surface of a workpiece to be measured by the at least one measuring system with a data capturing rate larger than 100 Hz, and the movement of the roughness sensor being in a frequency range below 100 Hz; 
 (b) make the captured data of the movement of the roughness sensor available for further data processing; and 
 (c) store the captured data of the movement of the roughness sensor. 
 
     
     
       14. The roughness measuring apparatus of  claim 13 , wherein the at least one measuring system for capturing the dynamic vibrations of the roughness sensor includes at least one distance measuring sensor that operates contactlessly or at least one dynamic tactile sensor.

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