Magnetic head with a main pole including first and second layers and manufacturing method for the same

Abstract

A magnetic head includes a medium facing surface, a coil, a main pole, and a substrate. The main pole includes a first layer, and a second layer lying on the first layer. The first layer includes a thickness-changing portion whose dimension in a direction perpendicular to a top surface of the substrate decreases with decreasing distance to the medium facing surface. At least part of the second layer is located on the thickness-changing portion.

What is claimed is: 
     
       1. A magnetic head comprising:
 a medium facing surface configured to face a recording medium; 
 a coil configured to generate a magnetic field corresponding to data to be written on the recording medium; 
 a main pole having an end face located on the medium facing surface, the main pole being configured to pass a magnetic flux corresponding to the magnetic field generated by the coil and to generate a write magnetic field for writing the data on the recording medium; and 
 a substrate having a top surface, wherein 
 the coil and the main pole are disposed over the top surface of the substrate, 
 the main pole includes a first layer including the end face, and a second layer lying on the first layer, 
 the first layer includes a thickness-changing portion whose dimension in a direction perpendicular to the top surface of the substrate decreases with decreasing distance to the medium facing surface, and 
 at least part of the second layer is located on the thickness-changing portion. 
 
     
     
       2. The magnetic head according to  claim 1 , wherein
 the first layer has a top surface farthest from the top surface of the substrate, 
 the second layer includes a front portion and a rear portion that extend along the top surface of the first layer in respective directions away from the medium facing surface, 
 the rear portion is located farther from the medium facing surface than the front portion, 
 a dimension of the front portion in a first direction orthogonal to the direction in which the front portion extends increases with increasing distance from the medium facing surface, and 
 a maximum dimension of the rear portion in a second direction orthogonal to the direction in which the rear portion extends is greater than or equal to a maximum dimension of the front portion in the first direction. 
 
     
     
       3. The magnetic head according to  claim 1 , wherein the second layer has an end located closest to the medium facing surface and at a distance from the medium facing surface. 
     
     
       4. The magnetic head according to  claim 3 , wherein
 the first layer has a top surface farthest from the top surface of the substrate, 
 the top surface of the first layer includes an inclined portion that is included in the thickness-changing portion of the first layer, 
 the inclined portion has a rear end located farthest from the medium facing surface, and a front end located opposite to the rear end in the inclined portion, 
 an entirety of the inclined portion is inclined with respect to the medium facing surface and a direction perpendicular to the medium facing surface such that the rear end is located farther from the top surface of the substrate than the front end, and 
 the end of the second layer is located farther from the medium facing surface than the front end of the inclined portion and closer to the medium facing surface than the rear end of the inclined portion. 
 
     
     
       5. The magnetic head according to  claim 3 , further comprising:
 a trailing shield formed of a magnetic material and having a front end face located on the medium facing surface at a position farther from the top surface of the substrate than the end face of the main pole; and 
 a spin torque oscillator located between the main pole and the trailing shield and electrically connected to the main pole and the trailing shield, wherein 
 the first layer has a top surface farthest from the top surface of the substrate, and 
 at least part of the spin torque oscillator is located on the top surface of the first layer at a position closer to the medium facing surface than the end of the second layer. 
 
     
     
       6. The magnetic head according to  claim 5 , wherein
 the top surface of the first layer includes an inclined portion that is included in the thickness-changing portion of the first layer, 
 the inclined portion has a rear end located farthest from the medium facing surface, and a front end located opposite to the rear end in the inclined portion, 
 an entirety of the inclined portion is inclined with respect to the medium facing surface and a direction perpendicular to the medium facing surface such that the rear end is located farther from the top surface of the substrate than the front end, and 
 the end of the second layer is located farther from the medium facing surface than the front end of the inclined portion and closer to the medium facing surface than the rear end of the inclined portion. 
 
     
     
       7. The magnetic head according to  claim 6 , wherein at least part of the spin torque oscillator is located on the inclined portion of the top surface of the first layer. 
     
     
       8. The magnetic head according to  claim 6 , wherein
 the top surface of the first layer further includes a stepped portion located closer to the medium facing surface than the inclined portion, 
 the stepped portion protrudes from an imaginary plane including the inclined portion in a direction away from the top surface of the substrate, and 
 the spin torque oscillator is disposed on the stepped portion. 
 
     
     
       9. The magnetic head according to  claim 8 , further comprising an insulating layer formed of an insulating material and interposed between the spin torque oscillator and the end of the second layer, wherein
 the stepped portion includes a first portion, and a second portion located farther from the medium facing surface than the first portion and closer to the imaginary plane than the first portion, 
 the spin torque oscillator is disposed on the first portion, and 
 the insulating layer is disposed on the second portion. 
 
     
     
       10. A manufacturing method of a magnetic head, the magnetic head including:
 a medium facing surface configured to face a recording medium; 
 a coil configured to generate a magnetic field corresponding to data to be written on the recording medium; 
 a main pole having an end face located on the medium facing surface, the main pole being configured to pass a magnetic flux corresponding to the magnetic field generated by the coil and to generate a write magnetic field for writing the data on the recording medium; and 
 a substrate having a top surface, wherein 
 the coil and the main pole are disposed over the top surface of the substrate, 
 the main pole includes a first layer including the end face, and a second layer lying on the first layer, 
 the first layer includes a thickness-changing portion whose dimension in a direction perpendicular to the top surface of the substrate decreases with decreasing distance to the medium facing surface, and 
 at least part of the second layer is located on the thickness-changing portion, 
 the manufacturing method comprising the steps of:
 forming the coil; and 
 forming the main pole, 
 
 wherein the step of forming the main pole includes the steps of:
 forming the first layer; and 
 forming the second layer such that at least part of the second layer is located on the thickness-changing portion. 
 
 
     
     
       11. The manufacturing method of the magnetic head according to  claim 10 , wherein
 the first layer has a top surface farthest from the top surface of the substrate, 
 the second layer includes a front portion and a rear portion that extend along the top surface of the first layer in respective directions away from the medium facing surface, 
 the rear portion is located farther from the medium facing surface than the front portion, 
 a dimension of the front portion in a first direction orthogonal to the direction in which the front portion extends increases with increasing distance from the medium facing surface, 
 a maximum dimension of the rear portion in a second direction orthogonal to the direction in which the rear portion extends is greater than or equal to a maximum dimension of the front portion in the first direction, and 
 the step of forming the second layer includes the steps of:
 forming a mask covering a portion near a position at which the medium facing surface is to be formed; 
 forming the second layer with the mask left intact; and 
 lifting off the mask after the second layer is formed. 
 
 
     
     
       12. The manufacturing method of the magnetic head according to  claim 10 , wherein the second layer has an end located closest to the medium facing surface and at a distance from the medium facing surface. 
     
     
       13. The manufacturing method of the magnetic head according to  claim 12 , wherein
 the first layer has a top surface farthest from the top surface of the substrate, 
 the top surface of the first layer includes an inclined portion that is included in the thickness-changing portion, 
 the inclined portion has a rear end located farthest from the medium facing surface, and a front end located opposite to the rear end in the inclined portion, 
 an entirety of the inclined portion is inclined with respect to the medium facing surface and a direction perpendicular to the medium facing surface such that the rear end is located farther from the top surface of the substrate than the front end, 
 the end of the second layer is located farther from the medium facing surface than the front end of the inclined portion and closer to the medium facing surface than the rear end of the inclined portion, 
 the step of forming the first layer includes:
 a step of forming an initial first layer that is to later become the first layer; and 
 an etching step of taper-etching the initial first layer to form the inclined portion in the initial first layer, 
 
 the initial first layer becomes the first layer upon formation of the inclined portion, and 
 the step of forming the second layer is performed after the etching step. 
 
     
     
       14. The manufacturing method of the magnetic head according to  claim 12 , wherein
 the magnetic head further includes:
 a trailing shield formed of a magnetic material and having a front end face located on the medium facing surface at a position farther from the top surface of the substrate than the end face of the main pole; and 
 a spin torque oscillator located between the main pole and the trailing shield and electrically connected to the main pole and the trailing shield, 
 
 the first layer has a top surface farthest from the top surface of the substrate, and 
 at least part of the spin torque oscillator is located on the top surface of the first layer at a position closer to the medium facing surface than the end of the second layer, 
 the manufacturing method further comprising the steps of:
 forming the spin torque oscillator; and 
 forming the trailing shield after the spin torque oscillator is formed, 
 
 wherein the step of forming the spin torque oscillator includes:
 a step of forming a layered film that is to later become the spin torque oscillator; and 
 a patterning step of patterning the layered film by etching to cause the layered film to become the spin torque oscillator. 
 
 
     
     
       15. The manufacturing method of the magnetic head according to  claim 14 , wherein
 the top surface of the first layer includes an inclined portion that is included in the thickness-changing portion of the first layer, 
 the inclined portion has a rear end located farthest from the medium facing surface, and a front end located opposite to the rear end in the inclined portion, 
 an entirety of the inclined portion is inclined with respect to the medium facing surface and a direction perpendicular to the medium facing surface such that the rear end is located farther from the top surface of the substrate than the front end, 
 the end of the second layer is located farther from the medium facing surface than the front end of the inclined portion and closer to the medium facing surface than the rear end of the inclined portion, 
 the step of forming the first layer includes:
 a step of forming an initial first layer that is to later become the first layer; and 
 an etching step of taper-etching the initial first layer to form an inclined surface corresponding to the inclined portion in the initial first layer, and 
 
 the step of forming the second layer is performed after the etching step. 
 
     
     
       16. The manufacturing method of the magnetic head according to  claim 15 , wherein
 at least part of the spin torque oscillator is located on the inclined portion of the top surface of the first layer, 
 the etching step is a step of forming the inclined portion in the initial first layer, 
 the initial first layer becomes the first layer upon formation of the inclined portion, 
 the step of forming the spin torque oscillator is performed after the step of forming the second layer, 
 the second layer has a top surface farthest from the top surface of the substrate, and 
 the step of forming the layered film is a step of forming the layered film on the inclined portion and a top surface of the second layer. 
 
     
     
       17. The manufacturing method of the magnetic head according to  claim 15 , wherein
 the top surface of the first layer further includes a stepped portion located closer to the medium facing surface than the inclined portion, 
 the stepped portion protrudes from an imaginary plane including the inclined portion in a direction away from the top surface of the substrate, 
 the spin torque oscillator is disposed on the stepped portion, 
 the step of forming the spin torque oscillator is performed after the etching step and before the step of forming the second layer, 
 the step of forming the layered film is a step of forming the layered film on the inclined surface formed by the etching step in the initial first layer, and 
 the patterning step may be a step of patterning the layered film and etching the initial first layer in succession to the etching of the layered film to thereby form the stepped portion in the initial first layer. 
 
     
     
       18. The manufacturing method of the magnetic head according to  claim 17 , wherein
 the magnetic head further includes an insulating layer formed of an insulating material and interposed between the spin torque oscillator and the end of the second layer, 
 the stepped portion includes a first portion, and a second portion located farther from the medium facing surface than the first portion and closer to the imaginary plane than the first portion, 
 the spin torque oscillator is disposed on the first portion, 
 the insulating layer is disposed on the second portion, 
 the manufacturing method further comprises the step of forming the insulating layer after the step of forming the spin torque oscillator and before the step of forming the second layer, 
 the step of forming the insulating layer includes the steps of:
 forming an initial insulating layer of the insulating material; and 
 etching the initial insulating layer to cause the initial insulating layer to become the insulating layer, 
 
 the patterning step is a step of patterning the layered film and etching the initial first layer in succession to the etching of the layered film to thereby form the first portion of the stepped portion in the initial first layer, 
 the step of etching the initial insulating layer is a step of etching the initial insulating layer and etching the initial first layer in succession to the etching of the initial insulating layer to thereby form the inclined portion and the second portion of the stepped portion in the initial first layer, and 
 the initial first layer becomes the first layer upon formation of the inclined portion and the second portion of the stepped portion.